基于表面等离激元的二维hBN薄膜光电性质调控及其深紫外探测增强机制研究

Recently, the efficient coupling and manipulation of surface plasmon resonance (SPR) have been extensively investigated with the applications in optoelectronic materials and devices. Meanwhile, as a rising star of two dimensional (2D) materials, hBN , has also attracted intensive attention due to its extraordinary optical, electrical and mechanical properties and thus potential application in ultra-violet(UV)/deep ultra-violet (DUV) optoelectronic devices. However, the optical modulation of 2D hBN thin film conjugated with plasmonic manipulation are still lack of systematic and in-depth experimental and theoretical investigations, which makes its virtual applications in device level a challenge. . In this proposal, based on the introduction of metal nanostructure arrays into 2D hBN thin film, the mechanisms of coupling and manipulation between the surface plasmons (SPs) and excitons in 2D hBN will be systematically studied, with the aim to enhance the photo response and achieve effective light manipulation upon the accomplishments of the highly sensitive detection in DUV region. The specific research work would cover: 1) the controllable fabrication of metal nanoarrays and realization of SPR effect in DUV spectrum; 2) the growth of high quality 2D hBN thin films and detailed investigations of its electronic structures and optical properties; 3) Preparation of metal/hBN composite structures and related optoelectronic propertie investigations. 4) The in-depth study of efficient resonance, coupling and modulation between the SPs in metal nanostructures and excitons in 2D hBN within DUV region; 5) Fabrication of photodetector prototype with MSM structure in metal/hBN structures, demonstration of the corresponding photoresponse properties in DUV spectrum and summarization of the related enhancement mechanisms. . The approval and implement of this project would help to gain in-depth understanding of light interaction and manipulation between metal nanostructures and 2D hBN, and provide new thoughts for fabrication of highly efficient and sensitive DUV photodetectors. Furthermore, the experiences and new guidelines achieved through this work would extend the application of plasmonic properties to other UV/DUV optoelectronic devices.

表面等离激元共振耦合及调控技术在光电材料及器件领域获得了广泛的应用，但在二维、宽禁带半导体材料hBN及其光电器件方面的应用尚有待进一步的研究和深入。本项目拟以二维hBN体系中金属纳米阵列结构的构建为基础，研究基于深紫外波段表面等离激元与新型二维hBN材料中激子的有效耦合，阐明可调控的金属/二维hBN介质体系中光谱增强的内在物理机制（包括光场调控、耦合及增强机制等），从而实现有效的二维hBN体系在深紫外波段的光谱探测增强的主要目标。通过本课题的开展，不仅对于深入理解表面等离激元与新型二维材料间的相互作用具有重要的科学意义，对于进一步开展高性能深紫外探测器件的制备，并拓展表面等离激元光子学在深紫外光电子器件上的应用也具有较高的研究价值。

表面等离激元共振耦合及其调控技术在光电材料及器件领域获得了广泛的应用，但在二维、宽禁带半导体材料hBN及其光电器件方面的应用尚有待进一步的研究和深入。本课题以二维hBN体系中亚微米金属纳米阵列结构的构建为基础，以基于深紫外波段表面等离激元共振耦合效应相关的物理问题（包括耦合、光场调控及增强机制等）为主要研究内容，开展了不同金属纳米结构的可控制备与调控研究，实现了不同介质环境下金属纳米结构的有效SPR共振及其光场调控；通过密度泛函理论(DFT)第一性原理计算，研究了不同结构衬底上hBN薄膜的生长行为和机制，并实验验证了高质量hBN薄膜的制备；借助于大面积氮化硼薄膜转移工艺的开发，成功制备了可控的金属纳米阵列/hBN复合结构，并基于紫外探测原型器件的构建，验证了表面等离激元效应在增强hBN薄膜深紫外光电响应电流、提高响应速率方面的优势，明确了耦合效应对于深紫外探测器件的光吸收、载流子输运调控方面的物理机制。通过项目研究所发展的相关技术成果具有潜在的应用前景，部分成果已在进行应用验证和技术转化过程中；项目积累的理论、材料生长与器件件研制工艺，也为今后进一步开展高效、稳定的光电材料制备和器件构建奠定了基础。