基于差动彩色共焦技术的高精度、大范围自由曲面在线检测技术研究

In recent years, due to the advantages of freeform surface in optical system simplification and optical performance optimization, it is widely used in the advanced optical systems. Due to the limitations of the cost of the reference mirror in the interferometry and the accuracy, measurement range and speed of the scanning method, the freeform measurement technology is facing unprecedented challenge. This project intends to research the key problems for high precision and wide range freeform surface in-situ measurement technology based on differential chromatic confocal technology: the technical problem which single confocal measurement technology can’t test wide range freeform surface accurately will be solved by introducing the chromatic confocal technology with wide measurement range to the differential confocal technology with high axial resolution, which will provide theoretical support for freeform surface in-situ metrology with high accuracy; the 3D scanning will be reduced to the 1D scanning by introducing the chromatic confocal technology and line scanning, which will save time, ensure the accuracy, and will provide guarantee for high precision in-situ measurement of freeform surfaces; the fast and high precision surface quality evaluation will be realized by researching the scanning data processing algorithm of the large numbers of data, which will provide the insurance of algorithm for the freeform surface in-situ measurement with high precision. The study and solution of above key problems will provide high precision and wide range freeform surface in-situ measurement technology based on differential chromatic confocal technique with theoretical basis and technical support, finally, it will provide the preparation for high precision fabrication of the freeform surface.

近年来，由于自由曲面在光学系统简化及光学性能优化等方面的优势，使得它广泛地应用于先进光学系统。由于干涉测量法参考镜造价和扫描法精度、范围及速度的限制，自由曲面检测技术面临着前所未有的挑战。本项目拟针对基于差动彩色共焦技术的高精度、大范围自由曲面在线检测技术中存在的关键问题进行研究：通过在高轴向分辨率的差动共焦技术中引入大测量范围的彩色共焦技术，解决单一共焦技术无法实现高精度大范围自由曲面检测的技术难题，为高精度的自由曲面检测提供技术支持；通过彩色共焦技术及线扫描的引入，将三维扫描降维到一维扫描，节省时间，保证精度，为自由曲面的高精度在线检测提供保障；通过大数据量点集扫描数据处理算法的研究，实现快速高精度的曲面质量评价，为实现高精度的自由曲面在线检测提供算法上的保证。上述关键问题的研究与解决为高精度、大范围自由曲面在线检测技术提供理论基础和技术保障，最终为自由曲面的高精度加工提供了前期准备。

近年来，由于自由曲面在光学系统简化及光学性能优化等方面的优势，使得它广泛地应用于先进光学系统。由于干涉测量法参考镜造价和扫描法精度、范围及速度的限制，自由曲面检测技术面临着前所未有的挑战。本项目针对基于差动彩色共焦技术的高精度、大范围自由曲面在线检测技术中存在的关键问题进行了研究：通过在高轴向分辨率的差动共焦技术中引入大测量范围的彩色共焦技术，解决了单一共焦技术无法实现高精度大范围自由曲面检测的技术难题，为高精度的自由曲面检测提供了技术支持；通过彩色共焦技术及线扫描的引入，将三维扫描降维到一维扫描，节省了时间，保证了精度，为自由曲面的高精度在线检测提供了保障；通过大数据量点集扫描数据处理算法的研究，实现了快速高精度的曲面质量评价，为实现高精度的自由曲面在线检测提供算法上的保证。上述关键问题的研究与解决为高精度、大范围自由曲面在线检测技术提供了理论基础和技术保障，最终为自由曲面的高精度加工提供了前期准备。