微机械加工多晶硅薄膜辐射效应基础研究

The applications of MEMS in the space applications, mission to Mars for example, is suitable for the trends of development of space applications, according to its advantages. The radiation reliability is the primary critical problem in the applications of MEMS in the space applications.The study on radiation effects of MEMS is seldom reported, according to its military background. This application is focused on gamma and electron beam irradiation effects on polysilicon membrane, which is widely used in MEMS in the mission to Mars. The microscopic characterization of polysilicon, which is irradiated, would be obtained via TEM test; the change of young's modulus, strain, and resistivity of polysilicon membrane would be obtained via test on Doppler vibrometer and other equipments; the distribution of energy of different rays in polysilicon membrane would be calculated via software; finally, the numerical model of radiation effects on polysilicon membrane would be established via previous results and radiation physics. And this numerical model will provide theoretical and experimental support for MEMS applications in space, mission to Mars for example.

随着航天科技的发展，MEMS因微型化而具备的功耗低、重量轻等优点，逐步进入航天探索应用中。火星探测已列入我国国家计划中。MEMS器件在航天应用中面临的首要问题是MEMS器件的辐射可靠性问题。一方面由于MEMS器件辐射可靠性属于前沿课题，国际上研究过程很少报道；另一方面，尽管辐射可靠性属于基础研究范畴，但它有较强的军事应用背景而很少报道。本项目将针对MEMS器件在火星探测中的应用环境，研究最常用的微加工多晶硅薄膜伽马辐射和电子束辐射效应。项目创新性地提出用多普勒测振仪测量薄膜辐射前后杨氏模量与应变等力学特性的变化；用TEM等微观表征方法确定薄膜辐射效应的微观机理；用计算机模拟手段获得射线在多晶硅薄膜中能量沉积的分布。通过本项目研究，将理解并建立薄膜辐射效应的理论模型，获得基础数据，为未来MEMS在火星探测等应用提供有价值的参考。