物理瞬态阻变存储器研究

Physically transient electronic devices which can physically disappear at prescribed times and at controlled rates, can minimize the hazardous waste of electronic devices effectively. Additionally, transient devices have great potential for the applications in implantable medical systems. On the other hand, resistive switching memory is the most promising candidate for the new generation of memory devices due to its simple structure, high speed, low power consumption and excellent scalability. Therefore, physically transient resistive switching memory is highly desirable for future high-density, green and implantable memory technology. This project will focus on the study of physically transient resistive switching memory. To obtain high performance transient memory, this project will systemically study the devices from materials selection, device fabrication, degradation process controlling and integrated processes development. By optimizing material system and controlling the micro-structure of materials, we will explore the methods for the precise control of physically disappear times and rates. In addition, the fabrication technology for larger area transient memory arrays on degradable substrates will be developed. The successful implementation of this project will provide important guidelines for the realization of transient resistive switching memory technology and also can promote the development of transient memory technology in our country.

物理瞬态电子器件可以有效解决废弃的电子产品对自然环境的污染问题，同时也可以应用于可植入的医疗电子设备。另一方面，阻变存储器具有结构简单、速度快、功耗低、可缩小性好等优势，是未来高密度存储技术的有力候选者之一。因此，物理瞬态阻变存储器是实现高密度、大容量、绿色以及可植入式存储技术的最有效路径之一。本项目针对尚缺乏研究的物理瞬态阻变存储技术，从材料选择，器件制备，降解过程控制以及集成技术这四个方面出发，研究物理瞬态阻变存储器。通过材料体系选择以及材料微观结构控制，获得降解速率及时间可控的瞬态阻变器件，探索出在新型可降解衬底上制备阻变器件阵列的工艺，为实现物理瞬态阻变存储技术奠定基础，从而推动我国物理瞬态存储技术的发展。

物理瞬态电子是指电子器件或系统可在既定的速率及时间条件物理消失，将物理瞬态电子与阻变存储技术结合，对于实现超高密度、绿色、可植入以及安全信息存储技术具有重要意义。本项目从物理瞬态阻变材料体系、高性能器件制备、大面积集成技术，及其新型应用等方面对物理瞬态阻变器件进行了深入系统的研究。提出一类新的可控降解、环境友好及生物兼容的材料，实现了可物理自消失的存储器件；提出一种新型的物理瞬态器件大面积集成工艺方法，解决了瞬态器件可实现性问题，实现了集成化的物理瞬态存储阵列；实现了新型物理瞬态智能仿生器件，提出并实现了面向安全神经计算的类脑功能器件，实现了物理瞬态随机计算。此成果在数据安全、生物集成界面及绿色环保电子技术等领域具有重要的应用前景。发表SCI期刊论文23篇，申请发明专利1项；培养硕士生6名，博士生4名。