基于光学超振荡的远场超分辨成像复合透镜

High-resolution optical imaging has great potential in applications, such as optical microscopy, optical remote sensing, sub-wavelength lithography, high-density data storage and so on. To address the problem of diffraction limit in conventional optical imaging devices, we proposed a hybrid lens for far-field super-oscillation imaging, which is an integration of quasi-continuous amplitude-phase-modulation based super-oscillation plane lens and plano-convex dielectric lens. It allows breaking the diffraction limit and realizing far-field super-resolution imaging with high throughput, small side lobes and wide field of view. The chromatic aberration will be eliminated by dispersion compensation between the two types of lenses. The research will focus on the physical mechanisms of optical super-oscillation imaging and wave front modulation based on sub-wavelength structures. Breakthroughs are expected in the theory on super-resolution imaging based on optical super-oscillation, the design method of sub-wavelength structures with desired amplitude-phase-modulation characteristics and dispersion properties, and the fabrication and integration techniques for large-area sub-wavelength structure array. Methods will be established for the design, test and evaluation of far-field super-resolution optical imaging devices. A device sample of far-field super-resolution imaging will be fabricated and tested. This research will lay theoretical and technical foundations for the label-free and post-processing-free far-field super-resolution optical imaging system，which is of great scientific importance and application prospect.

超分辨光学成像在光学显微、光学遥感、亚波长光刻、超高密度存储等领域有着重要的应用前景。项目针对传统光学成像器件的衍射极限问题，提出一种准连续振幅相位调控超振荡平面透镜与平凸介质透镜一体化集成的远场超分辨成像复合透镜，突破衍射极限，实现高通量、低旁瓣、大视场的远场超分辨成像；利用平凸透镜和超振荡平面透镜色散补偿，解决超分辨成像色差问题。项目将重点研究光学超振荡成像物理机制，突破基于光学超振荡的远场超分辨成像理论；研究亚波长结构光场调控物理机制，突破具有特定振幅相位调控特性和色散特性的亚波长结构设计方法，建立远场超分辨成像器件模型和设计方法；突破大面积亚波长结构阵列加工、集成工艺；研制远场超分辨成像复合透镜原理样品；建立远场超分辨成像器件测试系统及评估方法；为无标记、无需后处理的远场超分辨光学成像系统奠定理论和技术基础，具有重要的科学意义和广泛的应用前景。

本项目主要面向光学显微、光学遥感、深亚波长光刻、超高密度光存储等领域对非标记远场超分辨光学成像器件的迫切需求，针对现有远场超分辨透镜焦斑旁瓣大、视场小、聚焦效率低等不足，根据项目计划，开展了基于光学超振荡的远场超分辨新型成像器件研究。在理论研究方面，主要开展了超振荡光场构建、超振荡成像、光场调控等物理机制的研究；在此基础上，针对超振荡透镜研制需求，进一步研究了超表面结构的振幅、相位、偏振、色散特性，提出了多种振幅、相位、偏振、色散调控超表面结构，用以实现振幅、相位、偏振和色散的独立调控；并提出了多种标量、矢量超振荡光学器件和宽带、消色差超振荡光学器件的设计方法，开发了基于多线程、GPU计算加速的超振荡光学器件优化设计软件，并成功地应用于系列超振荡光学器件的优化设计；针对大口径超振荡光学器件制备，与国家纳米科学中心等单位合作，开展了金属-介质等复合超表面结构加工工艺的探索，基于金、铝、氟化镁、α-Si、高阻硅等材料，开发了大面积亚波长结构阵列加工、集成工艺，满足了本项目器件制备的需求；在上述理论研究、设计方法研究和工艺开发的基础上，针对可见光、红外和太赫兹波段，研制了无衍射超振荡器件、反射型矢量光场超振荡器件、平场超分辨透镜、宽带矢量光场超振荡透镜、宽带消色差超表面透镜、宽带三维空心光场超分辨透镜等超分辨/超振荡光学器件，其中大多数器件成功研制出样品，并完成了实验验证；针对超分辨成像，我们搭建了基于超振荡透镜的远场非标记超分辨光学显微成像实验验证系统，在实验上实现了分辨率为130nm的非标记远场超分辨光学显微成像。本项目研究较好地解决了超振荡光学器件点扩散函数压缩和旁瓣抑制、无衍射-超振荡/超分辨光束的实验产生、矢量偏振转换和超振荡聚焦功能集成等问题；并对大数值孔径透镜消色差问题、斜入射光束的超分辨聚焦问题进行了初步的探索。这些为超分辨透镜的发展和今后超分辨光学显微技术的突破奠定了良好的基础。