表面等离激元耦合光学微腔的自组装构建与光操控特性研究

Recently, the coupling of surface plasmon resonance (SPR) with optical-cavity-modes has drawn more and more attention due to its unique advantages in realizing specific resonance modes and manipulations in near or far-field. It has begun to emerge as a new research field in plasmonics and shows great potential applications to bio-sensing, luminescence enhancement, efficient solar energy conversion, nano-lasers and so on..In this proposal, based on the fabrication of metal/dielectric composite nanocavity arrays, the mechanisms of inter-coupling effects between the plasmonic-modes and optical-cavity-modes will be studied systematically, with the aim to fully utilizing the multi-modes coupling effect to achieve specific light manipulation upon the accomplishments of the highly sensitive sensing and efficient solar energy conversion. The specific research work would cover: 1) the configuration of metal/dielectric composite nanocavity arrays with adjustable parameters by self-assembled template methods and other micro-nano fabrication technologies; 2) the systematic investigation of basic physical mechanisms about the coupling effect and the corresponding light manipulation properties, as well as the intrinsic regulation factors; 3) the optimization of the fabrication processes of plasmonic coupled cavity structures and developing adjustable manipulation methods based on the controllable cavity parameters..The approval and successful carrying out of this project would help to fully understand the specific light manipulation effects induced by the plasmonic coupled cavity resonance modes in these size-tunable metal/dielectric cavity arrays, which would provide new guidelines to modulate local and far field optical properties within a broad-band light range. Furthermore, the specific light manipulation property in near field and far field in the metal/dielectric nanocavity arrays make them have other fascinating potential applications, including broadband light trapping, multi-wavelength excited surface enhanced Raman scattering (SERS) chips, nano-lasers and so on.

为解决传统金属纳米结构在局域场超增强、多模式表面等离激元共振等特异性光操控方面不足的问题，本项目拟以亚波长表面等离激元耦合微腔结构及其阵列的自组装构建为基础，通过引入光学微腔共振与表面等离激元共振模式耦合的方式，实现一系列特异性表面等离激元共振形式，以此拓展表面等离激元载体的光操控能力和范围。项目重点以表面等离激元耦合光学腔共振的相关物理问题（包括耦合机制及光操控原理）为主要研究内容，实验表征结合模拟分析，阐明光与耦合微腔阵列之间的相互作用机制，揭示表面等离激元耦合共振对局域场、共振模式等光学参数的内在调控规律，优化表面等离激元耦合腔阵列的制备工艺，最终获取新型、可控的特异性光操控新技术。通过本课题的开展，有望获取基于耦合腔体系的新型、特异性表面等离激元光场调控新途径，并在一定程度上拓展表面等离激元光子学的应用范围。

本项目是以亚波长表面等离激元耦合微腔结构及其阵列的自组装构建为基础，通过引入光学微腔共振与表面等离激元共振模式耦合的方式，以实现在复合微腔结构上获得一系列特异性表面等离激元共振形式为研究目标；以此为途径，进一步解决传统金属纳米结构在局域场超增强、多模式表面等离激元共振等特异性光操控方面不足的问题，探索新型特异性局域/远场等光场操控技术的有效途径。项目的研究重点是耦合微腔共振的相关物理问题（包括耦合机制及光操控原理），阐明光与耦合微腔阵列之间的相互作用机制，揭示表面等离激元耦合共振对局域场、共振模式等光学参数的内在调控规律，优化耦合腔制备工艺，最终获取新型、可控的特异性光操控新技术，并拓展在诸多微纳光子学操控领域的应用。. 项目开展以来，针对上述研究内容，获得了以下具体的重要成果：1).采用自主开发的晶圆级自组装技术结合成熟的微纳加工、调控工艺，实现了大面积（5英寸晶圆）周期性复合金属/介质微腔耦合阵列的制备及调控方案总结；2).通过光谱表征结合理论模拟，并借助于表面等离激元耦合杂化理论，理清了表面等离激元复合微腔的耦合机制，系统总结了表面等离激元共振耦合光学共振模式（表面等离激元微腔共振模式）的特征，特别是在局域场调控（场强分布）和多模式共振（宽光谱吸收增强）方面；3).首次研究了类金属/金属复合壳腔结构的表面等离激元耦合共振特性，揭示了类金属层在耦合共振及其光场操控应用上的作用机理，特别是类金属层在通过介质屏蔽实现近场局域化方面；4）.以上述等离激元耦合微腔的光场操控机制及调控途径研究为基础，设计并构建了若干种面向实际应用的复合微腔结构及其特异性光操控功能，实现了相关应用芯片/器件性能的显著提升。. 上述研究成果对于理解光在表面等离激元耦合微腔这一复杂体系亚波长尺度的特异性传输及操控的基本科学问题，以及拓展该项全新的纳米技术在高灵敏探测、高效光转换等领域的应用，都具有重要的科学意义。