杂散光约束下大面积刻划光栅三维槽形同步精密校正机制研究

For the requirement of the stray light intensity and groove profile precision of large area ruled grating in the areas of large optical systems, 193 lithography and others, the design concept "the synchronous precision correction of three dimensional groove profile of large ruled grating under the restriction of stray light" is proposed in this project. By studying the thermodynamic coupling behavior and dynamic constitutive model of the process of ruling grating aluminum, the mechanical-thermal-electromagnetic coupling dynamic model of piezoelectric actuator system for is established. The project analyzes the law of the overall performance of ruled grating precision positioning system influenced by the static and dynamic characteristics of each actuator, drive and control unit, researches the dynamics model and output decoupling method of overloading grating ultra-precision positioning system, gives the high-precision cooperative control.strategy of three piezoelectric actuators based on the feedback displacement of grating stage, illustrates the synchronous correction mechanism of three-dimensional groove profile of large ruled grating by using three piezoelectric actuators. The project also establishes the associated accuracy distance model of the synchronous correction system under the restriction of stray light, studies the configuration comprehensive theory and structure-electrical parameters multi-objective optimization method by constructing the parametric.numerical analysis platform and virtual prototype simulation platform of three-dimensional groove profile synchronous correction system. This project provides a theoretical basis and technical reference for the development of large area ruled grating with excellent stray light performance.

针对大型光学系统、193光刻等领域对大面积刻划光栅杂散光强度、槽形精度的超高要求，提出“杂散光约束下大面积刻划光栅三维槽形同步精密校正”设计概念。通过研究刻划刀挤压光栅铝膜的复杂热/力耦合行为和动态本构模型，建立压电致动系统的力/热/电磁多物理场耦合动力学模型；分析各个致动、传动和控制单元的静动态特性对刻划刀及光栅协同精密定位系统整体动力学性能的影响规律，研究重载光栅超精密定位系统动力学模型与输出解耦方法，给出基于位移反馈信息的三压电驱动高精度协同控制策略，进而阐明大面积刻划光栅三维槽形三压电同步校正机理。建立杂散光约束下光栅槽形同步校正系统关联精度距离模型，并通过构建光栅三维槽形同步校正装置的系统动力学数值分析平台与参数化虚拟样机仿真实验平台，研究其构型综合理论和结构-电气参数多目标优化方法。为研制具有优良杂散光性能的大面积高精度刻划光栅提供理论依据及技术参考。

大面积高精度衍射光栅是大型光学天文望远镜、193光刻和全谱仪等科学仪器的实现基础。光栅的主要制造方法分为机械刻划和全息离子束刻蚀两种。其中大型光学系统和高端科学仪器中使用的高精度光栅，由于刻划幅面宽、行程长、刻槽结构复杂、槽形精度要求苛刻等特点，必须使用机械刻划方式制造。. 然而，光栅刻划机分度系统的定位精度会对光栅周期误差产生较大影响；同时，光栅刻划刀的定位精度、刻划力大小及铝膜均匀性等都会引入槽深随机误差。所以，针对大型光学系统、193光刻等领域对大面积刻划光栅杂散光强度、槽形精度的超高要求，从提高光栅质量的角度考虑，本项目主要研究内容及成果如下：（1）通过光栅成槽过程中残余应力及回弹变形仿真分析，揭示了刻划刀挤压光栅铝膜的复杂热/力耦合行为，建立压电致动系统的力/热/电磁多物理场耦合动力学模型；建立了光栅周期刻槽误差能量分布求解和随机刻槽误差能量分布求解模型，揭示了刻槽误差对光栅鬼线强度和杂散光的影响规律。（2）提出了光栅刻划系统柔性结构件动态参数高速视觉检测方法和位移应变场测量方法，给出了光栅工作台定位系统传递模型辨识方法。进而分析各个致动、传动和控制单元的静动态特性对刻划刀及光栅协同精密定位系统整体动力学性能的影响规律，提出了重载光栅超精密定位系统动力学模型与输出解耦方法。（3）给出基于位移反馈信息的光栅刻划过程定位测量光路及压电驱动高精度协同控制策略，分别优化了光栅刻划分度系统在不同工作模式下的纳米级定位控制方法，进而阐明了大面积刻划光栅三维槽形同步校正机理。（4）通过构建的大面积高精度光栅刻划系统实验平台开展刻划实验，对所提出的刻槽误差分析理论、结构参数辨识方法和光栅刻划定位控制方法等进行了验证。 . 以上研究内容和成果为研制具有优良光学性能的大面积高精度刻划光栅提供理论依据及技术参考。