微波放电和激光烧蚀混合等离子体的特性和应用

Because of their high density, high ionization，low working pressures and so on, plasmas induced by electron cyclotron resonance (ECR) microwave discharge are widely used for surface treatment, film deposition, material etching etc. Pulsed laser ablation (PLA) of a solid target, which can create a transient plasma with high ionization and rapid expansion, has found successful applications in micro-analysis of materials, micro-processing of devices and preparation of thin films. Concurrent ECR microwave discharge and PLA can generate a hybrid-plasma which not only possesses characteristics of ECR plasmas and PLA plasmas but also can induce new physical and chemical processes. Various potential applications with special effects are expected for material preparation and surface treatment due to the extraordinary characteristics of the hybrid-plasma. .This project aimed to study the characteristics of the hybri-plasma generated through ECR microwave discharge and PLA and to explore the applications of the plasma. The state, space distribution and time evolution of the plasma were studied through experimental examination and numerical simulation, emphasizing on the characteristics of the plasma sheath which play important roles in various plasma applications for material treatment and preparation. We developed a new apparatus with multi functions with which various experiments were performed. This apparatus can also be used for many kinds of plasma applications for material treatment and film deposition. A new method was explored for preparation of compound films and has been successfully used to synthesize thin films of several materials. Attempts were also made to treat material surface under joint action of laser beam and ECR plasma. During the research period, thirteen papers were published and two patents were applied. Some distinctive results were obtained on the characteristics and applications of the hybri-plasma, which are also referential to other potential applications.

电子回旋共振微波放电和脉冲激光烧蚀的共同作用可以引发一类独特的等离子体.本项目拟ü笛楣鄄旌屠砺勰Ｄ?考察研究此类等离子体的特性和对产生条件的依赖关系,包括等离犹宓姆植己褪笨昭荼?鞘层特性,粒子行为,等离子体物质之间的相互作用以及它们对固体的作用机理,也为此类等离子体在材料合成上的作用及其它可能的应用探索提供参考.