航空发动机状态监控用聚合物先驱体陶瓷高温微传感器的应用基础研究

High-temperature resistant and robust micro-sensor networks are highly desirable for next-generation aero engine technology. In this project, we propose to develop a set of micro-sensors that can be used for online, in-situ measuring temperatures, pressures and vibration physical parameters in engines. The proposed sensors are based on recently developed polymer-derived ceramics (PDC), which possess many unique and superior properties, making them particularly suitable for the high-temperature applications. In order to fabricate the proposed sensors, the PDC materials with desired properties need to be developed. The relations of the electrical and dielectric properties with temperature and pressure need to be investigated. Based on the high-temperature electrical properties of PDC ceramics, we will design, fabricate and simulate the Wheatstone bridge pressure, temperature and heat-flux sensors. Based on the high-temperature pressure-dielectric properties of PDC ceramics, we will design a high-quality (Q)-factor microwave resonators wireless passive vibration micro-sensors, which is shown to be very sensitive to the vibration. The transmission line microwave couple and the evanescent-mode work mechanism of the resonators will be investigated and simulated. We will systematically investigate the effect of machining parameters on the quality of the machined work piece to obtain an optimal machining process for micro-fabrication the proposed sensors. We will test our sensor prototypes at various conditions including temperature, pressure and vibration to exam the validity and the repeatability. The proposed wireless passive PDC ceramic vibration sensors can be used for measurement in many important sections in combustion turbines such as the turbine blades and sections that are blocked by them.

在航空发动机状态监控对耐高温微传感器系统迫切需求的背景下，提出采用新型的耐高温传感元材料聚合物先驱体陶瓷（PDC）发展微传感器系统用于监控系统的动态温度、压力和振动等物理参数。从设计、合成PDC陶瓷出发，实现PDC陶瓷的可控制备，研究PDC陶瓷的电介电特性与温度、压力的特征关系。基于PDC陶瓷的高温电学特性，设计耐高温的惠斯登电桥式压力、温度和热流微传感器。基于PDC陶瓷的高温压介特性设计高Q因子谐振腔式无线无源振动传感器，设计出满足最大灵敏度和高Q因子要求的电介质谐振腔，对谐振腔传输线微波耦合和衰减模式理论进行研究和仿真模拟。研究PDC陶瓷的微加工成型技术，制造微传感器系统原型。在模拟的高温恶劣环境，评估传感器的有效性和可靠性。PDC陶瓷无线无源振动传感器，信号输出无需引线连接和供电电源系统，可以在发动机燃烧时的高温恶劣环境中的动态部件（涡轮叶片）正常工作。

2017-2020年度开展了国家自然科学基金面上项目“航空发动机状态监控用聚合物先驱体陶瓷高温微传感器的应用基础研究”（No.51675452）的研究。对耐高温微传感器用PDC陶瓷的可控制备及高温功能特性，PDC陶瓷基耐高温微传感器结构设计、仿真与模拟，PDC陶瓷基耐高温微传感器制造关键技术及其原型系统成型，PDC陶瓷基耐高温微传感器性能测试等研究内容进行了研究。突破了PDC陶瓷的精确合成与高温功能特性调节技术以及PDC 陶瓷微传感器的谐振腔结构设计等关键技术。研制出了PDC陶瓷基高温无线无源温度、压力传感器和PDC陶瓷基高温振动传感器原型，分别对PDC陶瓷基耐高温微传感器性能测试进行了研究，其中温度、压力传感器最高工作温度达1100℃，振动传感器最高工作温度达500℃，并具有良好的高温功能特性。本项目的研究对航空发动机等高温恶劣环境下工作的传感系统的设计和制作提供了技术支撑和技术积累。