纳米薄膜力学性能直接测量新方法研究

The mechanical feature is an important index in evaluation and application of nano thin films.However,no direct and effective testing method so far can be used, which seriously hindering the progress of this field. This application project is to build new means and method to realize direct and effective testing for the mechanical features of nano thin films. The details are as follows: (1) fabricating cantilever beams using laser direct writing to smartly avoid the influence of the substrate, and then adopting a microprobe nanoindenter as the testing means to realize direct and effective testing for the mechanical features of nano thin films;(2)Taking Au and TiO2 nano cantilever beams as examples,studying the mechanical features of nano thin films under different film fabrication methods and techniques;(3)by means of data analysis, to study the influence of inherent film features on the mechanical parameters, and finally establish the general model and method suitable for the mechanical properties of nano thin films.The results obtained will provide a base for the potential applications in the mechanical sersors, DOEs, and MEMs.

纳米薄膜力学性能是纳米薄膜评价和应用的重要指标。然而，到目前为止尚无有效的直接测量方法，严重阻碍了该领域的研究进展。本申请项目拟通过建立新的研究手段和方法实现纳米薄膜力学参数的直接测量，具体研究内容如下：（1）采用激光直写制备纳米薄膜双臂梁，巧妙回避衬底的影响，并通过微探针纳米压痕法实现力学参数的有效和直接测量；（2）以金膜及二氧化钛双臂梁为例，研究不同制膜方法和不同工艺下的纳米薄膜的力学特性；（3）通过数据分析，研究薄膜固有特性对力学参数的影响，建立适用于纳米薄膜力学参数测量分析的一般模型和方法。研究结果将为纳米薄膜在力学传感器、衍射光学元件（DOEs）、微机电系统（MEMs）等领域的应用提供可靠依据。

随着纳米器件的发展，其力学性能已经变得越来越重要。然而，超薄薄膜的力学性能至今还没有一种直接而有效的测量手段，本项目通过微纳加工方法，研究获得了一种无基底的超薄金属膜双臂梁的制作方法，结合原子力探针，实现了以金、钛为代表的力学性能直接测量。所获结果考虑了制模方式、各种测量误差的影响，具有更加准确的参考价值，为金属薄膜在众多领域中的实际应用提供可靠依据。