误差补偿式激光偏振干涉直线度及位移测量方法研究

Straightness is one fundamental geometric tolerance which characterizes the manufacturing performance of mechanical equipments and guide rails. Among various straightness measurement methods, laser interferometric straightness measurement has an advantage of high accuracy and has been a worldwide research focus. Although conventional laser straightness interferometers can realize the measurement of the magnitude of straightness error, they neither give the relative position of the straightness error, nor involve the motion errors caused by the measuring mirror and the measured object contact manner and also the influence on the measurement accuracy induced by Abbe error. To solve these problems, a novel straightness measurement method for simultaneously obtaining the straightness error and its position based on laser polarization interferometry is proposed in this project. By combining with determination of the pitch, yaw and roll errors of the measured object by using two quadrant detectors to compensate the measurement results of the straightness error and its position, the measurement of six degree-of-freedoms including two straightness errors, three rotational errors and their position can be achieved, and the principle of laser polarization interferometric straightness measurement with error compensation can be established. Then a novel laser polarization interferometric straightness measurement system with a high accuracy of 0.05μm/m among a long travel of 30m will be developed. The purpose of this project is aimed to set up an accurate straightness measurement and characterization method and provide a precision straightness test and calibration instrument that can be applied in the field of high-end equipment and guide rail manufacturing.

直线度是表征机械装备和导轨制造性能的一项基本几何量参数。在众多的检测方法中，激光直线度干涉测量法因具有较高测量精度而一直是国内外研究重点，但是现有该方法仅给出了直线度误差大小，未给出直线度误差的位置信息，也未涉及测量镜与被测对象的接触方式带来的运动误差和测量中阿贝误差对测量精度的影响等。本申请项目从光路结构设计的源头进行直线度测量原理的创新，提出一种激光偏振干涉测量直线度误差及其位置信息的通用方法，解决直线度误差及其位置信息同时获取的关键技术问题，辅助以四象限探测器检测俯仰角、偏摆角和转角，进行直线度测量结果的修正和补偿，实现被测对象2个直线度误差和3个转角误差及其位置的6自由度测量，建立一种误差补偿式的激光偏振干涉直线度测量原理，研制一套高精度的新型激光偏振干涉直线度测试计量系统装置，旨在建立精确的直线度信息测量与表征方法，为我国高端装备和精密导轨制造提供高性能的直线度检测与校准仪器。

激光干涉直线度测量仪器在精密装备和导轨性能检测有着重要的应用。本项目在资助期内，对误差补偿式激光偏振干涉直线度及位移测量方法进行了详细研究，研究内容包括测量方法设计、理论分析研究、测量系统设计与优化、光电信号处理方法研究、测量不确定度分析和实验验证等，提出了具有六自由度参数检测的激光偏振干涉直线度误差及其位移的测量方法，建立了误差补偿式激光偏振干涉直线度及其位移测量原理，构建了相关实验装置，并进行了验证。按计划完成了项目的研究内容，达到了预期研究目标。主要研究工作和创新点如下：.1. 提出了一种具有六自由度参数检测的激光偏振干涉直线度及其位置信息的通用测量方法，解决了直线度误差及其位置信息同时获取的关键技术问题，实现了被测对象2个方向直线度误差和3个转角误差及其位置的六自由度参数测量。.2. 研究了测量误差的形成机理和影响因素及其补偿方法，建立了误差补偿式激光偏振干涉直线度及其位移测量原理，提出了激光偏振干涉直线度及位移测量的激光光漂检测与补偿方法，实现了长行程直线度及位移的精密测量。.3. 完成了具有六自由度参数检测的激光偏振干涉直线度误差及位移同时测量系统的优化设计，设计了基于高频脉冲信号边沿锁定的激光偏振干涉信号处理方法，解决了偏振干涉信号相位的精确检测和整小数干涉条纹的准确计数与判向问题。.4. 设计了基于最小二乘法与二分搜索法的激光偏振干涉直线度误差评定方法，对激光偏振干涉直线度及位移测量方法的测量不确定度进行了综合分析评定。.5. 构建了激光偏振干涉直线度误差及位移测量系统实验装置，实验验证了测量原理与方法的可行性和有效性。.6. 取得的主要研究成果如下：.（1）在Opt. Express、Rev. Sci. Instrum.、Opt. Laers Eng.等知名学术期刊上发表SCI收录论文16篇。.（2）申请国内发明专利3项、美国发明专利1项，其中授权国内和美国发明专利各1项。.（3）培养博士生2名、硕士生6名。