基于MOEMS集成扫描光栅微镜的微型近红外光谱仪

Near Infrared Spectroscopy has several distinct advantages, such as non-destructive, rapid, high-throughput, qualitative and quantitative measurement when detecting the solid, liquid and gaseous objects, and has become an important approach for the on-line detection, industry process analysis and quality control. However, designing and manufacturing low-cost, high-performance miniaturized NIR spectrometer is one of the main bottlenecks constraining the development and application of NIR spectroscopy technology..As a senior researcher in the field of design and manufacture of the micro-spectrometer, a group led by the applicant propose a new structure for miniaturized NIR spectrometer which integrates grating, scanning micro-mirror and angle sensor on one single chip. A novel miniaturized NIR spectrometer will be implemented based on scanning grating micro-mirror consequently. It is a novel idea in this optical system to implement the closed-loop control to the scanning grating micro-mirror and acquire the high-precision spectrum based on the output of angle sensor. In this proposal, there are several breakthroughs including the design and manufacture technology of scanning grating micro-mirror, implementation of the hybrid-integrated miniaturized NIR spectrometer, precise control of scanning grating micro-mirror, accurate acquisition strategy of the spectrum, system calibration and error compensation. We attempt to develop a miniaturized NIR spectrometer reaching the international advanced level to promote the development of the miniaturized NIR spectrometer and pave the road for its application in the field of food security, and finally to solve common bottleneck of a new generation of miniaturized detection equipment.

近红外光谱分析技术以其无损、快速、高通量定性定量检测固态、液态和气态物质组分与含量的独特优势，已成为现场快速检测、流程工业在线过程分析与质量控制的重要手段。而低成本、高性能微型近红外光谱仪是制约近红外光谱分析技术发展与拓展应用的主要瓶颈之一。.在申请者长期研究微型光谱仪技术基础上，提出了一种将光栅、微镜和角传感器一体化单片集成的MOEMS 扫描光栅微镜新结构和基于扫描光栅微镜的微型近红外光谱仪，提出了基于扫描光栅微镜角传感器信号实现扫描光栅微镜高精度闭环控制和光谱信息准确探测的新思想与新方法。重点突破基于MOEMS 技术的扫描光栅微镜设计与制造关键技术，突破微型近红外光谱仪的集成设计、扫描光栅微镜精确控制与光谱准确采集策略、系统标定与误差补偿等关键技术。研制出达到国际先进水平的微型近红外光谱仪，实现在食品安全领域的应用验证，推动微型光谱仪整体技术发展，解决新一代微小型检测装备的共性瓶颈。

近红外光谱分析技术以其无损、快速、高通量、定性定量检测固体、液体和气体物质组分与含量的独特优势，已成为现场快速检测、流程工业在线过程分析和质量控制的重要手段，是现代仪器分析家族中发展最为迅速的新兴技术之一。高性能、低成本微型近红外光谱仪是制约新一代基于连续近红外光谱分析的微小型检测装备的共性瓶颈。.项目针对微型近红外光谱仪的迫切需求和存在的科学与技术问题，系统地开展了基于MOEMS 技术的微型近红外光谱仪及其核心器件的相关理论及关键技术研究。突破了集成扫描光栅微镜（光栅、扫描微镜和角传感器）的设计与制造关键技术；突破了基于集成扫描光栅微镜的微型近红外光谱仪的集成设计、基于角传感器信号的扫描光栅微镜精确控制、光谱准确采集的理论与方法；首次研制出具有完全自主知识产权的集成扫描光栅微镜和微型近红外光谱仪原理样机，首次研制出实用化石油油藏井下流体识别微型近红外光谱仪。.主要创新性成果：.（1）提出了基于偏（111）晶向硅基集成扫描光栅微镜新结构，可实现任意闪耀角度，建立了集成扫描光栅微镜的理论模型与设计方法；.（2）突破了三维线圈、光栅氧化锐化、薄膜制备与三维兼容加工等关键工艺，有效提高了闪耀光栅的衍射效率，形成了工艺规范；.（3）提出了基于扫描光栅微镜的微型近红外光谱仪新结构，实现了以单管探测器替代探测器阵列的低成本化；发现了该系统光谱点列图不随波长变化而变化，提高了光谱性能；.（4）率先提出了基于角传感器信号的扫描光栅微镜闭环控制和光谱采集与重构的新方法，有效提高了扫描光栅微镜控制和光谱信息准确采集。.获授权发明专利2项，公开发明专利3项；发表论文12篇；承办国际会议1次；培养博士6人、硕士7人。.项目形成了以核心器件为基础的微型近红外光谱仪基本原理、设计方法与光谱处理的理论体系和集成制造技术系列，将促进微型光谱仪整体技术的全面创新发展，为解决新一代基于光谱分析技术的重大微小型检测装备的瓶颈提供重要技术支撑。