基于MOEMS技术的静态傅里叶变换红外光谱仪微型化理论及关键技术研究

Currently, urgent requirement for micro Fourier transform spectrometers (μFTS) emerges from a wide range of fields, including environmental detecting, security, weather broadcasting, spatial exploration, unmanned aerial vehicle-borne distributed gas investigation, military analysis, criminal detecting, and unti-terrorism. Basing on pre-researches, this project is firstly proposed a MOEMS and micro optical elements based spatially modulated μFTS, in order to solve problems of the incompatibility between traditional optical elements with large size and weight and the other micro components, thus to realize the minimization of FITR. Theories about minimization and key technologies, such as correction of aberrations, light field uniformity, noise depression, micro optics design, and the integration of infrared system are planned to undertake within the project. Endeavors would be spent to solve problems the design of MOEMS and micro optics, and the core science and technology of their fabrication. Research achievements would be verified by establishing the FTS platform. By introducing the light weight beam splitter to realize light beam splitting, and by utilizing micro optical elements to achieve the system collimation and focusing function, the μFTS system gains not only the advantages of small volume and light weight, but also the high stability and reliability. Similar structure and fabricating method has not yet been reported in the internationally, and we hold the independent intellectual property rights. It has been declared for national invention patents.

目前，环境、安全、气象、空间探测、无人机载气体分布探测、军事分析、刑事技术以及反恐防化等诸多领域对微型傅里叶变换红外光谱仪(μFTIR)提出了十分迫切的需求。为解决传统光学元件体积、重量大，无法与微器件匹配而实现FTIR微小型化的瓶颈问题，本项目在前期研究的基础上，首次提出一种基于MOEMS器件和微光学元件的空间调制μFTIR。拟对该光谱仪进行微型化理论及关键技术研究，包括像差校正、光均匀化及噪声抑制等理论问题，微光学设计、微器件制作及红外微系统的一体化集成技术等，着重解决MOEMS器件与微光学元件的设计与制作中的关键科学与技术问题，并通过搭建μFTIR实验平台对研究结果进行验证。该系统通过MOEMS轻型分束器实现光场的分束，由微光学元件实现系统的准直与聚焦功能，不仅体积小、重量轻，而且具有高稳定性和可靠性。本研究的结构和方法在国际上未见报导，具有自主知识产权（已申报国家发明专利）。

目前，环境、安全、气象、空间探测无人机载气体分布探测、军事分析、刑事技术以及反恐防化等诸多领域对微型傅里叶变换红外光谱仪（uFTIR）提出了十分迫切的要求。本项目在前期研究的基础上，首次提出一种基于MOEMS器件和微光学元件的空间调制uFTIR。. 本项目从理论上建立uFTIR系统物理光学模型，通过对系统的整体性能评价、论证，对微光学器件在原理、设计、制造以及装调过程中引入的各种误差因素进行误差分析与误差分配。并对MOEMS轻型分束器、准直透镜、聚焦微透镜阵列等微光学器件进行设计优化，解决了像差校正、复消色差及照度均匀化等问题。对轻型分束器和多级微反射镜进行制备工艺与检测方法的研究，包括工艺流程和面形尺寸精度的控制。对uFTIR系统的关键光学器件进行加工与检测，实现轻型分束器有效尺寸为40mm×56.56mm，准直镜和聚焦微透镜阵列有效尺寸为Ф50mm。根据微系统中多级微反射镜、轻型分束器、微光学准直镜与聚焦微透镜阵列的外形、尺寸、位置等特点，对微系统进行一体化设计，并根据设计方案完成一体化集成。使用集成微系统对气体和液体样品实施红外光谱检测，得到与标准谱基本吻合的红外吸收谱线。系统可以测量的光谱范围覆盖2000cm-1—2700cm-1，光谱分辨率优于8cm-1。. 本项目首次提出将MOEMS器件和微光学元件相结合解决空间调制傅里叶变换红外光谱仪微型化的瓶颈问题。通过红外材料技术、MOEMS技术、微光学技术以及红外光谱技术等多学科交叉的研究，设计并研制了全部由微器件构成的光谱仪。为中波红外波段的系统微型化集成提供了一定的借鉴，并在诸多领域都具有十分广阔的应用前景。