基于连续光谱的精密位移传感机理及关键技术研究

Displacement sensor is an important part of automatic control system.The proposed research project focuses on precision displacement measurement mechanism of the continuous spectrum, using different wavelengths will have different focus of the Fresnel lens to achieve a greater range of different measurements, Fresnel lens simplified the measurement structure and improve the system suitability; improved algorithm based on adaptive wavelet can deduce noise ratio of spectral detection signal, this method usese the support vector machine to solve the small sample, nonlinear spectroscopy fast recognition algorithm to achieve high-speed high-precision spectral signal processing; error mathematical models will be established and the design of embedded grating alignment errors signal detection module for real-time will compensate measuring error. The project intends to develop technical parameters of the continuous spectrum displacement sensor with measuring range: 40 ± 3mm and resolution: 0.05um.

位移传感器是系统测试与自动控制的重要环节。本项目研究连续光谱的精密位移测量机理，采用菲涅尔透镜对不同波长聚焦点的位置不同实现较大量程的测量，简化了测量结构，提高了系统适用性；基于自适应小波去噪算法提高光谱探测信号的信噪比，利用支持向量机解决小样本、非线性光谱快速识别算法，实现光谱信号的高速高精度处理；建立连续光谱精密位移测量传感器误差数学模型，设计嵌入式光栅对准误差检测模块对测量信号进行实时误差修正。本项目拟研制连续光谱位移传感器样机的技术参数为：测量范围：40±3mm；测量分辨率：0.05um。

绝对位置传感器广泛应用于精密测量系统。本项目研究连续光谱的精密位置测量机理，采用菲涅尔透镜对不同波长聚焦点位置不同实现较大量程绝对位置的测量，简化了测量结构，提高了系统适用性；基于FPGA的TDC技术实现光谱快速识别算法，实现光谱信号的高速高精度处理。基于本项目的研究，研发的连续光谱精密位置测量传感器原型可实现0.02um的位移分辨率，成功研发了基于FPGA的高速CCD驱动与信号高精度处理技术，为工业传感提供共性基础部件；研发了高精度电压源，其性能可与国外典型同类产品性能相当，可广泛应用于精密电子测量系统。