光学超分辨检测用柔性可重构微透镜的定域化制造与主动操控

Considering the demand for far field transmission, large field of view, real-time/domain and ultrahigh resolution in optical super-resolution detection, this project proposes a flexible and reconfigurable micro-lens arrays featuring an actively-adjusted spatial form. The reconfigurable units of micro-lens containing nanomaterials “gene” were fabricated in a flexible and controllable surface. The active manipulation of the flexible and reconfigurable micro-lens toward the conduction wave and evanescent wave is realized by synergistically manipulating the spatial form of reconfigurable micro-lens’ units. In this regard, on basis of device configuration, manufacturing principles, process technologies and functional characteristics, we plan to reveal the manipulating principles of micro-lens’ spatial form toward the mutual interaction of the conduction wave and evanescent wave and establish the designing criteria of the flexible and reconfigurable micro-lens; develop a template-directed localized manufacturing methods of the flexible and reconfigurable micro-lens; probe the reconfiguration mechanism and manipulation principles of the spatial form and set up the coupled manipulating mechanism of multi-fields. This project aims to develop the localized manufacture and actively-manipulated technology of a novel flexible and reconfigurable micro-lens for super-resolution optical detection. Utilizing the plane imaging method, a high-resolution detection of 40 nm in horizontal and 1 nm in vertical will be realized in the far-field area, which provides new strategies for no damage, fast, low cost, practical super-resolution detection.

针对光学超分辨成像中远场传输、大视场、实时/域、分辨率高等需求，本项目提出了空间位姿可主动操控的柔性可重构微透镜阵列。在柔性可控曲面内，制备纳米材料“基因”定域植入的可重构微透镜单元，通过对其空间姿态进行耦合操控，实现柔性可重构微透镜对传导波和倏逝波的主动调控。为此，从器件结构、制造原理、工艺方法及功能特征等方面，拟揭示内蕴纳米材料“基因”微透镜空间位姿与传导波和倏逝波的相互作用机制，建立柔性可重构微透镜的设计准则；发展模板诱导定域化制造柔性可重构微透镜的方法；探明空间位姿的重构机制与操控原理，建立多场协同操控机制。本项目旨在发展用于光学超分辨检测的新型柔性可重构微透镜的定域化制造与主动操控技术，通过面成像方式，在远场区域，实现横向40nm，纵向1nm的高分辨率检测，为无损伤、快速、低成本、实用化的超分辨检测提供新途径。

本项目针对生物医学、纳米科技等前沿研究领域，大视场三维超分辨测量迫切需求，提出空间位姿可主动操控的柔性可重构微透镜阵列制造方法及主动操控技术。该方法创新性的引入可变形微镜阵列作为超分辨成像单元，形成具有高分辨力的可变超分辨三维光场，结合入射光场动态调制，实现纵向高度高精度检测，满足大视场、超分辨三维测量的需要；发展了模板诱导的定域化制造柔性可重构微透镜的方法，在快速驱动变焦、大视场、远程驱动、实时/域变焦、毛细数驱动的自组装、多场协同操控等方面分别进行了理论和实验研究。该方法能够在远场区域，通过面成像方式，实现具有无损伤、大视场、分辨率高的成像，将为促进我国微纳技术前沿研究领域的发展，提供有力技术支撑。