微构件的精度设计理论与方法研究

The error of micro machining in micro-dimension segment was analyzed by means of statistics. The model about micro-machining precision was established based on some statistical datum. A relation between light flux and micro-dimension was confirmed through test and analyse. The ratio of functional micro-precision to machining micro-precision was advanced used for selecting material and machining method. A set of methods of measuring and evaluating micro-component error was provided and design software was developed.

从精度的观点出发，用非线性系统理论分析研究常用微加工和测量方法的精度能力，建立能描述微制造精度的信息化模型；对典型微构件的功能要求进行理论分析和实验验证，建立能描述微构件功能精度的数学模型或数表；研究微构件误差的参数化评定理论和测量方法。此项研究可为微构件的精度设与检测提供理论基础、计算模型、评定准则及方法。