基于MEMS的近壁流动精细测量关键技术研究

Microelectromechanical Systeme(MEMS) technique is an interdiscipline system of measurement method, which applications include measurement and control on near-wall flow of aircrafts and wind tunnel test models, inertia measurement and communication technique in other fields, with its prominent advantages, such as small dimension, low weight, low energy comsumption, high time-efficiency and benefit-cost ratios,global measuring surface, good dynamic response, high spatial resolution and wide frequency response range etc., which show both broader scope and further perspective for applications in fine measurement on near-wall flow, micro-apperception,micro-control and research on flowphenomenon and theory.The aim of this investigation is to establish an MEMS testing technique suitable for measurement on near-wall flow in high speed wind tunnels, which is composed of analyses on relations of flow paramenters and MEMS sensors, characteristics of MEMS sensors, procedures for both MEMS calibrations and tunnel applications, investigations on test data processing dedicated, impacts assessments of uncertain factors in MEMS technique applications. By measurement on shear stress and pressure distributions and characteristics of boundary layer transition on typical test model surfaces in high speed wind tunnels, it is indicated that complex flow phenomena in near-wall of aircrafts and regular patterns of high speed in order to promote technical developments and advancements of national aeronautic technologies.

微机电（MEMS）测量技术是一种先进的多学科融合的测量方法体系，主要应用于飞行器表面、风洞试验模型近壁流动测量与控制以及需其他的惯性测量与信息技术等领域，具有体积小、重量轻、能耗低，动态响应性能好、空间分辨率和灵敏度高，频响范围宽等突出特点，可实现近壁流动精细测量、微感知、微作动与操控，在流动现象与流动机理的研究方面具有深远的应用前景。本项目将以建立基于MEMS的近壁流动精细测量技术及高速风洞应用为研究目标，从近壁流动信息与MEMS传感器关联方法、MEMS传感器性能标定与校准技术、高速风洞试验应用、试验数据处理方法及测量影响因素分析等方面入手，建立起适于高速风洞的MEMS近壁流动精细测量试验技术，通过对高速风洞中典型试验模型近壁流动参数（如剪切应力或压力）分布定量测量和边界层转捩特性分析，揭示高速条件下近壁复杂流动现象与规律，推动国家航空技术的发展与进步。

为了实现高速绕流条件下近壁流动的精细测量，设计研制了热敏MEMS传感器及其阵列和梳齿结构浮动元件电容式MEMS传感器，建立了MEMS传感器静/动态性能校准技术与系统，形成了基于MEMS传感器的近壁流动测量技术，在完成技术验证和MEMS传感器校准的基础上，在FL-21风洞利用所发展的技术测得了平板模型表面流动信息，并通过与同时测得的压力、Preston管测量结果等的比较验证了所发展MEMS技术的可靠性。本文系统总结了基于MEMS的近壁流动测量技术研究工作，包括MEMS传感器设计研制、静/动态性能校准方法研究与技术系统建立、MEMS传感器校准和风洞试验研究等。