水射流激光划片技术的应用基础研究

This project aim is to the key technologies on achieving a new water-jet laser scribing, which is for the quality problems of thin brittle materials. First, a relatively simple water-jet for liquid to the workpiece was proposed to cooling in laser scribing. It was present to simulate the method of achieving stability and high-speed water-jet by the principle of fluid dynamics. By modeling the plasma and vapor-bubble dynamic processes when the interaction of laser, solution and target in a uniform fluid medium, focusing on the complex phenomenon of transient explosive boiling when produced in pulse laser of different energy range heating the substances in the solution, the method for solving temperature field was brought forward when laser heating substances in the solution. The thermal effects and crack propagation were numerical simulated in the process of water-jet laser scribing by the fracture mechanics of brittle materials. water-jet shaping, thermal effects, crack propagation, as well as scientific issues were theoretically and experimentally studied in the process of water-jet laser scribing; and it reveal the mechanisms of laser and material interaction in the liquid environment and crack propagation of brittle materials. Through the study of the project, it provide a theoretical basis for a new water-jet laser scribing, the research can enrich and develop the theory of laser and matter interaction in the solution, and it promote the development of water-jet laser scribing.

本项目针对超薄脆性材料划片的质量问题，提出一种新的水射流激光划片工艺，对其中的基础理论进行系统深入的研究。首次提出在激光划片过程中采用较简单的水射流供液方式进行冷却，并运用流体动力学原理来模拟实现高速、稳定的水射流供液方法；通过对均匀流体介质中的激光、溶液和靶材相互作用时等离子体和蒸汽泡的动力过程进行建模，着重研究不同能量范围内脉冲激光加热溶液中物质产生的爆发沸腾复杂现象，提出激光加热溶液中物质的温度场求解方法；利用脆性材料的断裂力学原理对该划片工艺中的热效应和裂纹传播规律进行数值仿真。从理论和实验两方面分别对水射流激光划片工艺过程中的水射流成型、热效应、裂纹传播以及相关科学问题进行研究，揭示液体环境中激光与材料相互作用的机理和脆性材料的裂纹传播规律。通过本项目的研究，为一种新的水射流激光划片设备提供理论依据，其成果可丰富和发展激光与溶液中物质相互作用的理论，推动水射流激光划片技术的发展。

本项目针对超薄脆性材料划片的质量问题，提出了一种新的低损伤激光划片工艺，对其中的基础理论进行了较系统深入的研究。提出了在激光划片过程中采用较简单的水射流供液方式进行冷却，并运用流体动力学原理来模拟实现高速、稳定的水射流供液方法，及溶液流动特性对溶液辅助激光加工工艺的影响规律；通过对溶液环境下激光加工工艺中，充分考虑固液界面爆发沸腾换热、水射流冷却和冲击等的影响因素，提出溶液辅助激光划片工艺中的温度场及热应力求解方法；利用脆性材料的断裂力学原理，以水射流-激光作用下单晶硅的微损伤去除机理为研究对象，根据激光作用下单晶硅力学性能的变化、破坏的发展，揭示脆性材料损伤产生的机理、材料去除的机理。从理论和实验两方面分别对水射流激光划片工艺过程中的水射流成型、溶液流动特性、热效应、裂纹传播以及相关科学问题进行研究，揭示液体环境中激光与材料相互作用的机理和脆性材料的裂纹传播规律。通过本项目的研究，为一种新的水射流激光划片设备提供理论依据，其成果可丰富和发展激光与溶液中物质相互作用的理论，推动水射流激光划片技术的发展。