主动剪切干涉非球面精密测量及复合评定

A novel lateral shearing interferometer has been developed. The interferometer adopts complete common optical path and polarized phase shifting interference, with convenient shear quantity and shear direction adjustment and phase stepping. The interferometer has simple mechanism and compact structure. A phase unwrapping algorithm based on statistics and self-calibration principles has been put forward, the Zernike polynomial fitting algorithm for phase reconstruction over a circular field improved, and a B-spline fitting algorithm based on pixel to pixel mapping relation over a rectangular field is proposed. The interferometer was proved suitable for precision plane, spherical and aspherical surface test under experimental conditions and also in manufacturing or on-line environments. Theories and algorithms for engineering surface analysis, information separation and evaluation by wavelet, fraction and statistic principles have been developed. The decomposition, abstraction and reconstruction of surface texture information, together with its statistical characteristic analysis and evaluation have been investigated. Definitions and evaluations of surface function and process information concerning surface roughness have also been researched. These works have erected fundaments for effective engineering surface analysis and evaluation about their complicated function and process characteristics.

非球面光学元器件，因其独特性能优势，将成为21世纪科学仪器、光电信息产业发展的基础。其精密工业测量方法及评定问题亟待解决。本项目提出研制主动剪切干涉测量系统。研究主动调整技术，并与共光路、偏振移相、抗干扰等技术相结合。研究干涉图重建技术。本项目还研究复合评定方法。该方法可用于非球面、曲面等形状及形貌的功能工艺分析。