基于高精度打印的柔性有序化碳纳米管气敏传感器研究

The flexible electronic devices with good deformability and efficient,low cost fabrication process have broad application prospects such as IT, energy and medical fields. In order to solve the key problems such as coffee-ring effect, low accuracy and poor binding force with substrate during flexible carbon nanotube fabrication, this project propose to develop an inovative fabrication method to make the flexible carbon nanotube gas sensors with superior properties by Aerosol Jet Printing technique and auxiliary electrical field. Theuniform and aligned carbon nanotube patterns will be deposited by Aerosol Jet Printing with aid of the electrical field. The homogenious dispersion of carbon nanotube conductive ink and the surface modification of flexible substrate will be studied in detail.In addition, the method and mechanism of removing the coffee-ring effect will be revealed during carbon nanotube gas sensor devices printed porcess.The influence of electrical field on the alignment of carbon nanotube network will also be studied and the integrated fabrication process of field-effect transistor typed carbon nanotube flexible gas sensors will be established . Finally, the effect of metal electrodes and carbon electrodes on sensitivity of gas sensor will be investigated, and the mechanism between work function of electrodes, schottky barrier and response of gas sensors will be explored. To sum up, this project may provide the theoretical and scientific basis for printing flexible carbon nanotube gas sensors with superior properties.

柔性电子器件以其独特的可变形能力及高效率、低成本的制造工艺，在信息、能源和医疗等领域有广泛的应用前景。本项目以高性能的柔性碳纳米管气敏传感器为研究目标，针对目前制备方法所存在的咖啡环效应、沉积精度低、与衬底结合力差等问题，创新性地提出利用高精度气溶胶打印与外电场相结合来实现碳纳米管图案的均匀、有序化沉积。通过对碳纳米管深度预处理研制单分散、高纯度的碳纳米管导电墨水，并结合柔性衬底的表面改性处理，探索气溶胶打印碳纳米管的成膜质量调控方法，研究导电墨水、衬底和打印参数与碳纳米管分散性之间的内在联系，分析咖啡环效应消除的相关机制，探讨气溶胶打印与辅助电场结合对碳纳米管有序化排列发挥作用的规律。在此基础上，利用气溶胶打印实现柔性有序化碳纳米管气敏传感器的构建，分析电极功函数和肖特基势垒与传感器灵敏度之间的作用机理。通过上述问题的研究，为实现高性能柔性碳纳米管气敏传感器的制作提供理论依据和科学基础。

本项目背景是利用碳纳米管结合气溶胶打印制备气敏传感器，具有灵敏度高、工作温度低和尺寸微小等一系列优点。气溶胶打印具有的无掩模沉积、线宽精度高（最小线宽5μm）、打印范围广、墨滴尺寸小（最小体积为0.001pL）和兼容性强等优点，为制备柔性高性能碳纳米管气敏传感器奠定良好基础。.本项目的主要研究内容包括基于高纯度、单分散碳纳米管溶液的导电墨水研制；溶液、衬底和打印参数之间的内在联系及咖啡环效应的消除机制；外电场对气溶胶打印效果发挥作用的规律及碳纳米管有序化排列的机制；柔性场效应气敏传感器的设计、仿真与制备研究；探索柔性传感器电极功函数和肖特基势垒对传感性能影响的机理等几个方面。.本项目的重要结果主要有包括制备出适合于气溶胶打印的分布均匀的碳纳米管导电墨水，优化出气溶胶打印碳纳米管的工艺参数，并在柔性衬底上打印出碳纳米管气敏传感器。同时，探索了减小溶液在衬底表面的咖啡环效应以及电极功函数和肖特基势垒对气敏的影响。.本项目的关键数据主要包括碳纳米管导电墨水制备过程中的添加剂的配比，抽滤的功率，超声的时间和离心的转速等，还包括气溶胶打印过程中气体的雾化功率，打印的速度等。.本项目通过基于气溶胶的柔性有序化碳纳米管气敏传感器的研究，提供了克服现有方法所存在的关键科学难题极具潜力的新选择，有望为高性能碳纳米管气敏传感器的低成本制造开辟新途径，为实现高性能柔性碳纳米管气敏传感器的制作提供理论依据和科学基础。