基于电场-流体复合约束的同轴聚焦电射流纳米打印研究

This project will focus on the work of high resolution, low cost and flexible electrohydrodynamic jet (E-Jet) printing for functional nanostructural fabrication. This work will aim to solve the limitation of jet dimension and jet environmental disturbance occurred in the present single cone-jet printing mode.In this project, a novel coaxial focused E-Jet printing method is proposed based on electric field-fluid compound restriction for the printing of nanostructure of functional materials. This work will deeply investigate the effect of the electric tangential force and fluidic viscous tangential force acting on the double jets interface on the compound restriction focus mechanism of nano-jet. Then stable nano-sized jet will be formed in this project. This project will also examine the effect of structural parameters of coaxial needles on the jet operation behavior and produce the coaxial focused E-Jet needles which are suitable for the formation of the stable nano-jet. This project will examine the effect of jet dimensions and jet travelling track on the printed structure and establish the mapping relation between the jetting parameters and printed structural shape and dimensioin. This project will also study the online measuring and feedback control technique of current and jetting parameters then realize the fine control of the E-Jet printing process. Finally, through the printing of typical functional nanostructures and nanodevices, this project will realize the application verification of coaxial focused E-Jet printing theory and technique. It is confirmed that no same research reports were published at home and abroad by far. The research results will has significant theoretical reference and practical application value in the field of nanofabrication.

本项目以纳米功能结构的高分辨率、低成本、柔性电射流打印制造为对象，以突破现有单锥-射流打印模式的射流尺度和射流环境干扰限制为目标，提出基于电场-流体复合约束的同轴聚焦电射流打印新方法，实现功能材料纳米结构的打印制造。深入研究双层射流界面电场切向力和流体粘滞切向力对纳米射流的复合约束聚焦机制，获得纳米尺度的稳定射流；探明同轴微喷针的结构参数对射流运行行为的影响规律，制作出适用于形成纳米稳定射流的同轴聚焦微喷针；研究射流尺寸及射流运行轨迹对打印结构的影响，构建射流参数与打印结构形状和尺寸的映射关系，进一步引入射流电流与射流参数的在线测量与反馈控制技术，实现对电射流纳米打印过程的精细控制；最后通过对典型纳米功能结构与器件的打印制造，实现对同轴聚焦电射流纳米打印原理和技术的应用验证。目前国内外尚未见有同类研究的报道，研究成果将在纳米制造领域具有重要理论参考及实际应用价值。

在国家自然科学基金项目资助下，针对纳米功能结构的高分辨率、柔性电射流打印制造开展研究。深入研究了同轴聚焦电射流打印机理、工艺和装备，发展出了基于电场-流场复合约束的纳米打印新方法，实现了PZT、ZnO等材料的纳米点阵列、纳米线阵列、纳米简直梁、纳米悬臂梁等纳米结构的打印制造，为纳米器件制造提供了一种高效、高质的工艺途径；研发出同轴聚焦电射流纳米分辨率打印设备，打印最小线宽为40nm，打印纳米结构速度达300mm/s，打印缩颈比达到3200:1，为纳米器件制造提供了创新装备；建立了同轴聚焦电射流仿真模型，实现了同轴聚集电射流打印过程的电场-流场耦合，探明同轴聚焦电射流的电场-流体复合约束作用机理，为同轴聚焦电射流纳米打印提供理论支撑；发展出了基于电流测量的电射流打印过程测量、控制与精调技术，设计研制出电射流打印的电流测量装置，建立了射流参数与打印结构形状和尺寸的映射关系，为纳米打印提供了有效测控方法；打印制造压电纳米梁结构展现出高压电常数、高柔性等优质电学、力学特性，具有灵敏电压输出，为高性能纳米器件提供基础结构和工艺方法。共发表论文25篇，其中SCI国际期刊论文13篇，包括Nanoscale封面1篇、Macromolecular Materials and Engineering封面1篇，影响因子7.0以上2篇，3.0以上6篇，授权国家发明专利14项，在国际学术会议上做特邀报告6次。项目研究成果将对纳米器件、纳米制造的相关技术和理论的发展具有重要推动作用。