表面吸附及多物理场作用下微纳米传感器性能的力学研究

Due to the urgent development demand and inadequate theoretical research of high performance micro-nano sensors currently, based on the micro-nano mechanics and continuum mechanics, this project is aimed to investigate the relaxation behavior of solid surface and the surface reconstruction induced by adsorbed atoms/molecules, quantitatively describe the stable configuration formed by adsorbed atoms/molecules on microcantilever surface, develop nonlinear theoretical model and numerical simulation method of the adsorption-induced behavior of micro-nano sensor with multi-physical fields (temperature, force and electric fields, et al.), establish the quantitative relationship between mechanical response, surface stress variation of micro-nano sensor and the related physical and mechanical parameters. The effect of surface relaxation and surface reconstruction on the mechanical response of the microcantilever sensor is investigated. The effect of surface step defects on the mechanical behavior of microcantilever surface is investigated. The effect of the viscosity property of liquid and soft matter on the vibration characteristics of the microcantilever sensor is investigated. This project will be helpful to further understand the physical and mechanical mechanisms of the surface stress change induced by adsorbed atoms/molecules on micro-nano sensor, and the research results will provide an important reference for the design, optimization and control of high performance micro-nano sensor and MEMS.

针对当前发展高性能微纳米传感器的紧迫需求和理论研究的不足，本项目以微纳米力学和连续介质力学为基础，研究固体表面弛豫和吸附原子/分子诱导的表面重构行为，定量描述原子/分子吸附在微梁表面形成的稳定构型，发展热、力、电等多物理场作用下微纳米传感器表面吸附力学行为的非线性理论模型与数值模拟方法，建立微纳米传感器的力学响应、表面应力变化与相关物理力学参数之间的定量关系。研究表面弛豫和表面重构对微梁传感器力学响应的影响。研究表面台阶缺陷对微梁表面吸附的力学行为的影响。研究液体和软物质的粘度属性对微梁传感器振动特性的影响。本项目将有助于深入认识微纳米传感器表面吸附诱导表面应力变化的物理和力学机制，研究结果为高性能微纳米传感器和微机电系统的设计、优化和调控提供重要参考。

微/纳电子机械系统技术是近年来发展起来的一种新型多学科交叉的技术，能制造出各种性能优异、价格低廉、微型化的传感器、执行器和微系统，在生物医学、环境监测、食品工程、航空航天、军事安全等领域具有广阔的应用前景。本项目以微纳米力学和连续介质力学为基础，研究固体表面弛豫和吸附原子/分子诱导的表面重构行为，定量描述原子/分子吸附在微梁表面形成的稳定构型，发展力、电、温度等多物理场作用下微纳米传感器表面吸附力学行为的非线性理论模型与数值模拟方法，建立微纳米传感器的力学响应、表面应力变化与相关物理力学参数之间的定量关系。目前，已经建立了力、电作用下微纳米梁传感器表面吸附力学行为的理论模型，推导了弛豫应变、表面应力、表面弹性、表面压电对微纳米梁静态弯曲变形和共振行为的影响关系，考虑了开路、短路、闭路三种情况，并进行了数值分析。本项目将有助于深入认识微纳米传感器表面吸附诱导表面应力变化的物理和力学机制，研究结果为高性能微纳米传感器和微/纳机电系统的设计、优化和调控提供重要参考。