基于多稳态分岔控制的环境监测微质量传感器设计方法研究

Uncontrollable bifurcation is the bottleneck problem for the engineering application of nonlinear parametric resonance mass sensors. The project aims to propose and establish an effective control method for guiding the bifurcation pathway through integrately modifying the multistable structure parameters and piezoelectric parameters, thus establishing the design methods and measuring strategies for multistable bifurcation based micro mass senors applicable to monitor the environment pollution and the hazardous article leakage in real time, which includes: 1) design of the multistable structures integrating the linear and nonlinear mechanical properties to fulfill the application requirements of the real time enviroment monitoring, and also propose effective design method for the multistable structures with incremental jamping thresholds which are adjustable through modifying mechanical structures. 2) establish nonlinear parametric resonance model considering the influences from the sbsorption film, piezoelectric driving materials, and external excitations, and study the influences of the key structural parameters, piezoelectric control parameters and system damping on the jamping boundaries; 3) establish the electromechanical coupling model for the parameteric vibration of piezoelectric driven nonlinear structures, and propose the bifurcation control method through the micro-modulation of the multistable structures and piezoelectric control parameters; 4) analyze the affecting factors from the multistabilities to the sensor’s sensitivity and resolution, and give the stable and efficient measuring methods and control strategies of the external excitation. Finally, the new sensor was designed and fabricated for completing and validating the proposed design methodology.

分岔不可控是制约参激非线性微质量传感器工程应用的瓶颈问题。以环境污染和危险品泄漏监测为应用背景，本项目提出基于多稳态结构势阱可设计性和压电控制参数协调的分岔路径控制方法，建立满足环境监测需求的新型微质量传感器设计理论与测试方法，具体包括：1) 建立集线性与非线性力学性能于一体的功能化多稳态结构创新构型设计方法，建立具有跳跃阈值递增且可调特性的多稳态结构设计方法；2) 建立考虑质量吸附膜(形状、位置)、压电材料布置和激励载荷形式(偏置电压、驱动电压幅值与频率)影响的多稳态传感器动力学设计理论与方法，研究多稳态特征参数、压电控制参数及阻尼对跳跃边界的影响关系；3) 建立压电驱动非线性参激振动的机电耦合分析模型，研究分岔拓扑结构与系统物理参数之间的对应关系，建立基于多稳态特征与压电控制参数协同微调方法的分岔路径控制方法；4) 研究稳定而高效的传感器测试方式与激励控制策略，研制新型传感器样件。

本项目建立了基于多稳态分岔的环境监测微质量传感器系统设计理论与方法，研制了一系列新型MEMS微质量传感器，可用于恶劣环境下污染物的在线测量，构建了强非线性系统用于微质量探测的新理论和新方法，具体包括：1) 集线性与非线性结构于一体的敏感结构创新设计方法；2) 基于压电参数的非线性传感器分岔动态特征调制方法，实现了分岔跳跃边界的有序控制；3) 基于压电与结构协同的灵敏度提升方法—阻抗法；4) 阻尼环境下非线性微传感器测量方法和控制策略。这些方法突破了谐振式微质量传感器敏感机制存在的测量缺陷，避免了扫频测量方法耗时的问题，同时有效抑制恶略环境噪声和干扰，实现高精度、高可靠性的室外环境在线测量，对于构建环境异常监测与预报体系具有重要的意义。成果包括：中国电子学会自然科学二等奖1项，获ASME IDETC CIE 2018 最佳论文奖1篇，ICMT2016最佳报告奖1 次，IDETC/CIE Nonlinear Dynamics最佳会议组织奖1 次；在本领域重要学术期刊发表论文 19 篇，SCI检索 12 篇，EI检索19 篇，包括ASME Transaction Journal of Applied Mechanics, Journal of Applied Physics, Int. J. Nonlin. Mech., Sensors and Actuators A, IEEE Sensors Journal, 机械工程学报、光学精密工程等期刊，申请国家发明专利12项，授权发明专利9项，参加本领域学术交流20次，大会邀请报告1次，论坛主题报告3次，与法国科学中心应用力学研究所专家联合获批国家外专局项目1项，高质量完成了本项目即定研究任务。