金刚石三维纳米结构的光电特性与器件物理研究

Nanoscaled diamond presents unique physical properties such as spin quantum states of NV center, superconductivity induced by enhanced coupling of electron-phonon. For fabricating new type diamond devices based on its fantastic properties in nanoscale, 3D nanostructures and nanodevices of diamond shoule be developed. In this project, the mechanisim, method and technology for fabricating 3D diamond nanostructures and devices should be studied, and their photoelectric properties and device physics should be explored, the high function and reliability devices based diamond 3D nanostructure will be constructed. First, Energetic Particle Beams such as electron beam, focused ion beam and plasma will be used to fabricated 3D diamond nanostructured arrays, then their physical properties such multi-function and high reliability were studied; then, the 3D diamond devices with nanostructure such as signle photon source was constructed and the device physics was explored. By performing this project, the novel method for fabricating 3D dianmond nanostructures and devices should be established, and the.scientific issues will be resolved, which is important in diamond science and application.

具有优异性能的金刚石在纳米尺度呈现出新奇的物理特性，如氮－空位的自旋量子态、电－声子耦合增强的超导电性等。为利用这些新奇特性，金刚石三维纳米结构的制备与器件物理的研究成为构筑新型器件的科学基础。本项目拟开展金刚石三维纳米结构的加工原理与方法研究，构建多功能的金刚石三维纳米结构，探索其光电特性的功能化机制与方法，实现器件结构与性能可控。首先，基于已有的金刚石纳米材料制备与新奇物性研究基础，利用载能离子束可控加工新方法，构筑金刚石纳米线阵列三维结构，并使之功能化，探索其新奇的光电特性，建立三维结构与性能间的构效关系；其次，研究基于高精度载能粒子束加工的金刚石三维纳米器件构筑方法，探索光电器件物理性能。通过上述研究，建立金刚石三维结构与器件加工的新方法，解决三维功能纳米器件的物理基础与应用中面临的科学问题，具有重要的科学意义和应用价值。

具有优异性能的金刚石在纳米尺度呈现出新奇的物理特性，如氮－空位的自旋量子态、电－声子耦合增强的超导电性等。为利用这些新奇特性，金刚石三维纳米结构的制备与器件物理的研究成为构筑新型器件的科学基础。本项目采用金刚石三维纳米结构加工的新方法，构建了多功能的金刚石三维纳米结构，研究了其光电特性的功能化机制与方法，实现了器件结构与性能可控。首先，利用载能离子束可控加工新方法，构筑成功金刚石纳米线阵列三维结构，并使之功能化，探索了其新奇的光电特性，建立了三维结构与性能间的构效关系；其次，研究了载能粒子束可控加工金刚石三维纳米器件的方法，研究了光电器件的物理性能。通过上述科学技术问题的解决，建立了金刚石三维结构与器件加工的新方法，解决了三维功能纳米器件的物理基础与应用中面临的一些科学问题，具有重要的科学意义和应用价值。