基于软光刻法的多层垂直耦合光波导研究
基本信息
结项摘要
本项目研究下一代高聚物光学器件所必需的层间互连多层高聚物波导，即垂直耦合多层高聚物波导（Vertically-coupled multilayered polymeric waveguide），是当前有机光电器件、光波导技术与光电子学领域的一个前沿的重要研究课题。主要研究多层高聚物波导间的低损耗三维互连结构，且与光学波导层可集成一体的耦合解决方案。软光刻转印法提供了制作该耦合结构的最佳手段：三维硅酮模版（PDMS elastomer）结合UV固化光学树脂可实现纳米精度的互连结构复制，使用单个母版可实现该结构极低成本的大批量转印，切实符合未来光电器件的制作工艺要求，具有极其广泛的应用前景。
项目摘要
项目成果
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数据更新时间：2023-05-31
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