聚合物基光波导柔性应力/压力传感器相关基础研究

A strain/pressure sensing system based on all polymer photonics chip is proposed for monitoring two-dimensional surface pressure. This kind of sensing system is expected to overcome the shortcomings of traditional fiber grating sensors' low flexibility and high temperature dependence. The polymer waveguide devices function as sensing element are proposed to be fabricated on a polymer substrate to achieve flexible characteristic. The flexible and stretchable sensing element can be attached to irregular object surface with a broad range of potential applications, such as structural health monitoring, automotive industry and medical instruments. This project includes several parts of work: design of the polymer photonics devices and coupling section between the fiber and the waveguide; the fabrication technology development of the polymer waveguides on flexible substrates; the measurement of the sensing element and assessment of the sensing system. Each part of the work has to be optimized to improve the performance of the sensing system for its further applications. This project provides a technology platform for developing flexible strain/pressure sensing systems.

以全聚合物基光波导器件为基本传感单元实现一种可对表面受力情况进行监测的传感系统，克服传统光纤光栅应力传感器柔韧性差、对温度依赖性强等缺点。该柔性表面应力/压力传感器可直接贴敷于物体表面（特别是可贴敷于凸凹不平的物体表面）完成对表面受力情况的监测，在土木建筑、医疗器械等领域有着广阔的应用前景。本项目通过对光波导器件的设计及传感机理的理论分析，完成传感器原型光波导器件的优化设计；探索和研究基于柔性衬底的聚合物光波导器件的制备工艺；最终制备出应力/压力传感器的原型器件，并完成和实现传感系统的实验验证和特性参数的评估。通过对光波导器件设计、制备工艺、信号解调等方面的优化，进一步改进和提高传感系统的性能，为其日后应用提供理论基础和技术平台。

表面应力/压力传感器在土木建筑、医疗健康、航空航天等领域都有着非常重要和广泛的应用。本项目以全聚合物基光波导器件为基本传感单元研究可对表面受力情况进行监测的传感系统，克服传统光纤光栅应力传感器柔韧性差、对温度依赖性强等缺点。从光波导基本理论出发，针对传感器实际应用中存在的温度敏感、灵敏度低、解调系统复杂等一系列科学问题，提出了光学柔性二维切向力触觉传感器、消除温度敏感的柔性聚合物光波导功能器件、Slot结构聚合波导高灵敏光学传感器、传感解调一体化聚合物波导传感器等多种传感器和功能器件新结构，进行了聚合物集成波导实验制备，探索研究并解决了聚合物波导微纳米压印工艺中的表面粗糙度、脱模等问题，为研究聚合物基柔性应力/压力传感器及其应用提供了坚实的理论基础和实验制备、测试等技术支持。.本项目研究工作发表学术论文10篇（其中SCI收录2篇，EI收录5篇，大会邀请报告1篇），申报国家发明专利2项（其中1项已授权）。