基于薄膜拉伸热压印法实现规模化碳纳米管薄膜晶体管器件制备及其性能研究

Carbon nanotube thin film has great potential applications in flexible electronics devices, due to its excellent electrical, optical and mechanical properties. To achieve and transfer uniform carbon nanotube thin film with single semiconducting behaviour in a scale-up technique is still an essential issue in the fabrication of high-performance carbon nanotube thin-film transistors. In this proposal, we propose a method to form a low-density carbon nanotube thin film by stretching a high-density carbon nanotube thin film, which is an ideal channel material to fabricate high-performance carbon nanotube thin-film transistors. We will investigate the thin film stretching process of in a certain pressure-thermal condition, and evaluate the stretching performance based on various polymer materials. We will analyze the conduction mechanism of carbon nanotube network in percolation theory, and clarify the effect of carbon nanotube anisotropic morphology to improve the transistor performances. We will investigate the key techniques including pressing-transferring print and lift-off to fabricate carbon nanotube thin-film transistors on rigid/flexible substrates. We further verify the possibility of this method for the application in roll-to-roll printing technology. The results obtained in this proposal will pave the way for scalable fabrication in high-performance carbon-based nanoelectronics.

碳纳米管薄膜具有优异的电学、光学和力学特性，在规模化制备柔性电子器件领域具有广阔的应用前景。目前如何获得性能均一半导体性的碳纳米管薄膜沟道材料并实现薄膜的有效转移，仍然是高性能碳纳米管薄膜晶体管器件研究中的关键问题。本项目提出通过薄膜纵向拉伸来调控碳纳米管薄膜的密度，使之成为构建高性能碳纳米管薄膜晶体管的理想沟道材料。将重点研究碳纳米管薄膜在力、热条件下的拉伸变形过程，考察基于不同聚合物材料体系的碳纳米管薄膜的拉伸性能；分析碳纳米管薄膜的渗流导电机理，阐明各向异性碳纳米管薄膜及其网络结构对晶体管性能提升的作用；突破聚合物薄膜压印转移及剥离技术，验证碳纳米管薄膜拉伸压印技术用于碳纳米管薄膜晶体管卷对卷印刷制备的可行性，为规模化制备高性能碳纳米管电子器件提供科学基础。

本项目实施以来，按照计划任务书开展碳纳米管薄膜晶体管的器件设计、装配与性能研究，并开展了光电器件性能的研究，全面完成了研究任务。取得的主要研究成果包括：建立了米级单壁碳纳米管薄膜的宏量连续制备方法；实现了规模化碳纳米管薄膜晶体管及电路的器件制备方法；采用光刻胶作为栅绝缘层制备碳纳米管薄膜晶体管；分析碳纳米管薄膜的渗流导电机理，阐明各向异性碳纳米管薄膜及其网络结构对晶体管性能提升的作用；突破聚合物薄膜压印转移及剥离技术，验证碳纳米管薄膜拉伸压印技术用于碳纳米管薄膜晶体管卷对卷印刷制备的可行性。此外，还研究了制备出大面积柔性碳纳米管AMOLED驱动电路，研制出柔性碳纳米管光电传感-存储器件。截至2020年3月，共计在Nature Communications、Advanced Materials等杂志发表SCI论文13篇，相关研究工作在学术会议上作报告29次。项目负责人孙东明研究员获得了兴辽英才人才计划支持。本项目的顺利实施展现了碳纳米管薄膜晶体管在电学、透光性、柔性及可塑性等方面的独特性能，为实现高性能、柔性、透明的新型碳纳米电子器件提供科学基础。