飞秒激光脉冲序列诱导下还原制备跨维度金属微纳结构机理及工艺研究

Multi-dimensional metal micro/nano-structures are the key structures in micro/nano devices and have wide applications in the fields of biology, materials and integrated circuits. As one of the important techniques for the fabrication of metal micro/nano-structures, femtosecond laser induced reduction reactions technique has developed rapidly in recent years. Femtosecond laser pulses can be shaped into femtosecond laser pulse trains based on the temporal pulse shaping technique and the fabrication advantages of pulse trains are more obvious as compared with the regular femtosecond laser. However, the control of the photo-reduction reactions of metal ions by femtosecond laser pulse trains has not been realized and the electron excitation and transfer rules during the processes have not been found so far. This leads to the blindness in the selections of the key parameters, and the low quality, precision and efficiency. In this project, the laser induce reduction reactions by the novel method of femtosecond laser pulse trains will be investigated to establish the theory-method-application system. This project will focus on the excitation and control mechanism of the photo-reduction reactions by the femtosecond laser pulse trains to optimize the key parameters and to improve the quality, precision and efficiency. The representative applications of the novel method will also be realized to provide key technique supports for the fabrication of the micro/nano devices.

跨维度金属微纳结构是微纳器件中的关键结构，在生物、材料、IC等领域得到了广泛应用。飞秒激光诱导还原制备技术作为重要的金属微纳结构制备技术之一，近年来发展迅速。基于时域脉冲整形技术，可将常规的飞秒激光脉冲调制为时间间隔在飞秒量级的脉冲序列，其优势更加明显。然而，目前仍未能实现飞秒激光脉冲序列新方法对金属离子光致还原反应的调控，未能掌握还原制备工艺中电子的激发、转移规律。这就导致在设计飞秒激光脉冲序列关键参数时具有很大的盲目性，很难做到同时兼顾效率、质量和精度。针对上述难点，本项目围绕金属微纳结构的激光诱导还原制备技术，以飞秒激光脉冲序列为创新性调控手段，建立理论-方法-典型应用的完整研究体系；重点研究飞秒激光脉冲序列的激发、调控机理以及金属微纳结构的还原制备工艺，用以设计、优化其关键参数，大大提高效率、质量和精度；并将实现新方法的典型应用，从而为微纳器件制造等领域提供关键技术支撑。

在各位专家、基金委、学校、学院领导及相关老师们的大力支持下，项目顺利实施，取得了一系列成果并陆续发表，在国内外主流杂志发表SCI检索论文16篇，其中影响因子大于6的6篇；申请国家发明专利15项，其中授权国家发明专利6项；项目负责人获批中组部“万人计划”青年拔尖人才，作为第4完成人获教育部技术发明一等奖1项。理论层面，探索了飞秒激光脉冲序列对金属离子光致还原反应的激发机理，为工艺研究提供了理论指导。方法层面，实现了飞秒激光脉冲序列诱导下金属微纳结构还原制备新方法；设计、优化飞秒激光脉冲序列关键参数，实现了制备过程中的激发增强效应，优化了离子还原速率和结晶生长形态，从而大大提高了金属微纳结构还原制备的效率、质量和精度。典型应用层面，应用新方法，实现了在表面拉曼增强、农药检测，超表面与微纳器件的金属布线等方面的典型应用。