压电驱动系统的动态迟滞非线性分析与高速精密定位技术的研究

The dynamic hysteresis of piezoelectric actuator system and coupling effect of multi-dimension precision positioning system limits the accuracy of the high-speed precision positioning system. A control strategy is proposed to compensate for the dynamic hysteresis and reduce the coupling effect. After analysis the dynamic hysteresis of piezoelectric actuator system, the rate-dependent hysteresis model will be developed to describe the dynamic hysteresis. A controller designed with the proposed model will used to compensate the dynamic hysteresis of piezoelectric actuator system. The coupling effect of multi-dimension precision positioning system exhibits the dynamic hysteresis property, because it is driven by the piezoelectric actuator system. The rate-dependent hysteresis model is proposed to describe the dynamic hysteresis nonlinearity of coupling effect. The decoupling controller will estimate error caused by the coupling effect, and then update the driving voltage in the corresponding direction to cancel out this error. A high-speed precision positioning system will be designed by incorporating the controller for dynamic hysteresis and the decoupling controller. In this proposal, a high-speed precision positioning system with more accuracy and faster response will be developed by compensating the dynamic hysteresis of piezoelectric actuator system and reducing the coupling effect of multi-dimension positioning system.

针对压电驱动系统的动态迟滞非线性与多维精密定位中的耦合效应严重影响定位精度与响应速度的现状，提出基于速率相关的迟滞非线性模型设计控制器，补偿迟滞动态迟滞非线性、减小耦合效应的方法。拟通过测试压电驱动系统的动态迟滞非线性特性，结合现有的迟滞非线性模型理论，研究速率相关的迟滞非线性模型的建模方法，基于速率相关的迟滞非线性模型设计压电驱动系统的迟滞补偿控制器；受压电驱动系统的影响，多维精密定位中的耦合效应也呈现出动态迟滞非线性，将采用速率相关的迟滞非线性模型描述耦合效应的过程，设计解耦控制器通过模型估算耦合效应引起的误差，并在相应的运动方向上修改驱动电压，抵消耦合效应引起的误差；将补偿动态迟滞非线性的控制器与解耦控制器相结合，设计高速精密定位系统。通过本项目的实施，将有效减小了压电驱动系统的动态迟滞非线性与多维定位的耦合效应对高速精密定位的影响，大幅提高了高速精密定位系统的精度与响应速度。

本项目在深入分析了驱动结构的动力学与压电材料的动态迟滞特性，测试了在不同应用场合下压电驱动系统的响应，并结合经典的迟滞建模与非线性系统理论，研究压电驱动器的迟滞非线性特性与输入速率之间的关系，建立与输入信号的变化率有关的动态迟滞模型，并用于实时控制提高微位移定位系统的精度。通过分析多维高速精密定位中，各驱动方向之间的耦合特性，结合本项目研究的动态迟滞模型，设计了解耦控制器，并将解耦控制与动态迟滞控制相结合，在补偿压电驱动系统迟滞非线性的同时，减小了耦合效应对驱动精度的影响。基于非线性控制理论，对动态迟滞控制与解耦控制器进行参数优化，提高了精度与响应速度。.