纳米功能器件的聚焦离子束制造基础研究

Based on the Focused Ion Beam (FIB) technology, our previous project aims to solve the key problems in the fabrication and optimizing of the Carbon Nanotube (CNT) probe for AFM. By implementing research systematically on the CNT probe’s fabrication platform developement,analysing mechanical property of CNT and optimizing key parameter as well as characterization its metrology precision, we realized the fabrication of CNT probe shorter than 500nm with precision of angle controlling higher than 1° and the project is progressing well. During this project, we have published one book chapter, seven SCI papers which have been cited by other researchers for 16 times till now, achieved four patents and gave 3 Invited presentations.The application project research aims at investigating the problems occur in the Focused Ion Beam fabrication of the nanoscale function devices, such as size effect in nanoscale and processing technic of special materials,proposing advanced new fabrication strategies such as coating associated FIB fabrication and ion implantation damage reparing. By combining the theory with experiment analysis we would clarify the microcosmic mechanism of the damage occurred during the FIB fabrication as well as the way to repair them and implemented the process of designing, fabricating and applying research about nanoscale function devices based on FIB fabrication. New technologies, new methods, and their data base and specifications about the microcosmic mechanisms of nanoscale device fabrication based on FIB would be established. Our research would explore from the aspects of the fabrication method, material character and microcosmic mechanism to the basic investigation of FIB fabrication, overcome the manufacturing problem of nanoscale function devices which limit their applications.

项目基于聚焦离子束(FIB)技术,针对纳米管(CNT)原子力显微镜探针的制备及其结构优化关键制造难题,系统展开了CNT探针制造装备的研制、CNT探针力学性能分析、关键参数优化和探针表征精度分析等研究,实现长度小于500nm、角度控制精度优于1°的CNT探针制备,项目进展顺利。发表1篇Book Chapter,7篇SCI论文,他引16次,授权专利4项,3次特邀报告。申请项目针对纳米功能器件FIB纳米制造中存在的纳米尺寸效应、材料加工工艺性等关键科学问题,提出镀膜辅助FIB制造、离子注入损伤修复等纳米制造新方法和新策略;阐明聚焦离子束的制造损伤及其修复方法等微观作用机理;开展FIB制造的典型纳米功能器件应用研究,建立FIB纳米制造的新工艺、新方法和微观机理的数据库和规范。本课题探索从制造方法、材料特性和微观机理等角度，展开FIB纳米制造基础研究，解决制约纳米功能器件应用的关键制造难题。

本项目通过紧密围绕纳米光学功能器件的加工制造，针对聚焦离子束（Focused Ion Beam, FIB）纳米加工中亟待解决的关键科学技术问题，系统开展了FIB纳米加工机理、纳米加工新方法、加工质量及功能器件性能评价等FIB制造基础研究。1）基于实验和分子动力学模拟研究，从纳米空间和皮秒-纳秒时间的四维角度揭示了FIB轰击损伤及其退火热处理修复的损伤动态演变机制。阐明了材料各向异性对FIB加工质量的影响规律。2）阐明了纳米阵列结构FIB加工中驻留时间、加工轨迹和束流搭接比等多参数耦合机制，解决了高密度、变流向纳米结构阵列的纳米加工难题，实现了32nm线宽且长宽比>100:1的纳米模板阵列、25nm线宽星形结构阵列加工，并成功应用于中科院光电所主持的973项目《波的衍射极限关键科学问题研究》（2013CBA01700）中。3）建立了有效抑制FIB轰击沟道效应、刃口半径小于20nm的金刚石刀具FIB修形方法，依托该研究顺利实施，获批一项NSFC-RS国际合作与交流项目（已被英国皇家学会纳入“牛顿基金”）和一项国家自然基金面上项目连续资助。4）提出了基于沉积辅助等逆向思维FIB纳米加工新方法，包括FIB刻蚀结合后续镀膜和胶体球自组装结合离子溅射镀膜等方法，实现了小于10nm热点间隙结构阵列的制备，并应用于SERS拉曼增强衬底及其痕量检测性能评价研究。发表论文SCI 10篇、EI15篇，授权专利5项（含1项PCT），培养研究生15名，国际会议大会主题报告1次/邀请报告6次。受邀成为Current Nanoscience期刊客座编辑，国际会议委员会委员4次，大会（分会）主席4次。项目负责人被中国工程院选拔为先进制造方向代表，参加“第四届中美工程前沿研讨会”、“中印青年工程领袖研讨会”并作报告。项目研究成果，被天津市科委组织鉴定评价为"达到了国际领先水平"，获得天津市技术发明一等奖。