刚柔耦合多自由度超精密工作台建模和控制研究

Vibration is the critical factor that restricts continuous improvement of the precision and control bandwidth of ultra-precision motion system. The main cause of vibration is the rigid-flexible coupling structure dynamic. Therefore, it will have both theoretical and engineering value to study the modeling and control of multiple degree of freedoms (DOFs) ultra-precision stage with rigid-flexible coupling structure. Taking dynamic modeling and control multi-degree of freedom ultra-precision stage as the object, this research targets at comprehensively improving its precision, control bandwidth and robustness. Moreover, setting the modal state-space model as an intended breakthrough, this project is going to study the modeling and control of multiple DOFs ultra-precision stage with rigid-flexible coupling structure systematically. Meanwhile, this project will proceed with the progressive research process of “dynamic modeling – model-based feedback control – robust control”, and the practical experience in engineering application. In the end, this project intends to propose a set of technology and methodology, including ultra-precision stage theoretical modeling, experimental modeling technology, modern control, and robust control strategy. They can afford both theoretical and technical support for improving the precision, resolution, response speed, bandwidth, stability and robustness of high speed and high precision components of high-end equipment in China.

振动是制约超精密运动系统精度与控制带宽提升的关键要素，而刚柔耦合结构动力学特性是导致振动出现的根本原因，因此对其开展建模与控制研究具有重要理论意义及工程应用价值。本项目以刚柔耦合结构多自由度超精密工作台为研究对象，以动力学建模和控制为研究手段，以综合提高超精密工作台精度、控制带宽和鲁棒性三个关键控制性能指标为研究目标，以超精密工作台模态状态空间模型研究为切入点，结合“动力学建模—基于模型反馈控制—鲁棒控制”的递进研究过程，来对刚柔耦合多自由度超精密工作台的建模和控制理论进行系统性的研究，积累其工程应用实践经验，提出一套超精密工作台理论建模与实验建模技术，以及现代控制与鲁棒控制策略，为提高我国高端装备高速、高精度部件的精度、分辨率、响应速度、带宽、稳定性和鲁棒性提供理论及技术支撑。

振动问题是制约超精密运动系统精度与控制带宽提升的关键要素，而刚柔耦合结构动力学特性是导致振动问题出现的根本原因，因此对其开展建模与控制研究具有重要理论意义及工程应用价值。本项目以刚柔耦合结构多自由度超精密工作台为研究对象，以动力学建模和控制为研究手段，以综合提高超精密工作台精度、控制带宽和鲁棒性三个关键控制性能指标为研究目标，以超精密工作台模态状态空间模型研究为切入点，结合“动力学建模—基于模型反馈控制—鲁棒控制”的递进研究过程，来对刚柔耦合多自由度超精密工作台的建模和控制理论进行系统性的研究，积累其工程应用实践经验，提出了一套超精密工作台理论建模与实验建模技术，以及现代控制与鲁棒控制策略，为提高我国高端装备高速、高精度部件的精度、分辨率、响应速度、带宽、稳定性和鲁棒性提供理论及技术支撑。