静电驱动纳米定位系统的微扰动作用机理与非线性动力学行为研究

With the rapid development of nano-manufacturing equipment and technology, the stroke, the speed and precision indexes of the positioning and driving systems have become increasingly demanding. The purpose of this project is to research the coupled nonlinear dynamics of the nanopositioning systems in nano-manufacturing equipments under complex environments. The driving principle of the high-speed, high-precision, large stroke electrostatic driven comb-actuators based on MEMS technology will be studied. The effect of micro-disturbance on the response distortion characteristics and nonlinear vibration of the coupled system under complex conditions will be also investigated and discussed. Dynamic modeling and analysis methods of the nanopositioning systems actuated by electrostatic force under multi-energy fields will be presented. In addition, the vibration control and disturbance compensation method will be proposed to explain the nano-precision motion generation. It will focus on the weak vibration signal processing and testing methods for the dynamic characteristics of the nanopositioning systems. The project will be to solve the complex issues, including micro-disturbance mechanism and response distortion characteristics, and nonlinear dynamics, of the nano-positioning systems in the nano-manufacturing equipment, provide the theoretical foundation and technical assurance for designers, and promote significantly the development of the subject of dynamics and control in nano-manufacturing devices and systems.

随着纳米制造装备和技术的迅速发展，对定位和驱动系统的行程、速度和精度指标要求越来越高。本项目旨在研究纳米制造装备中复杂环境下纳米定位系统的耦合非线性动力学问题，研究基于MEMS技术的高速、高精度、大行程梳齿机构的静电驱动原理，研究微扰动作用下的响应畸变特性，研究多场耦合作用下静电驱动纳米定位系统动力学建模及分析方法，揭示复杂环境下微扰动对耦合系统非线性振动的影响规律，研究纳米精度运动生成中的振动控制与扰动补偿方法。本项目研究将为解决纳米制造装备中纳米定位系统的微扰动作用机理与响应畸变特性、非线性动力学难题提供理论基础和技术保证，对促进纳米制造系统动力学与控制学科发展具有重要的意义。

本项目研究了纳米机械系统在复杂环境下的耦合非线性动力学问题，详细总结并讨论了静电驱动下纳米机电系统中的吸合不稳定效应，建立了有界噪声激励下原子力显微镜定位操作中针尖-样品纳米系统的动力学模型，研究了随机噪声、弯月面接触角对针尖-样品系统中非线性动力学特性的影响，提出了描述尺度效应对纳米定位操作系统中内模态耦合影响的理论模型，分析了尺度效应作用下模态耦合对吸合电压、谐振频率的调频作用，提出了考虑表面效应的纳米斜裂纹梁的优化连续模型，研究了裂纹倾角、裂纹深度、表面弹性、表面应力和表面密度对纳米裂纹梁横向振动的影响。本项目的研究将为解决复杂环境下纳米机械系统中的非线性动力学问题提供理论基础和技术保证，对促进纳米系统中动力学发展具有重要的意义，并在国际学术期刊上发表SCI论文5篇，项目负责人获教育部自然科学一等奖（排名第2）。