高可靠无装药强化聚能MEMS发火器件机理研究

Because one of the key areas of advanced micropyrotechnics technology, MEMS triggered urgent needs of modern lightweight weapons, small and micro-satellites and MAV. And to improve low output power and MEMS micromachining suited to the development of the initiator, we propose a new route, including the structure of a pseudo blackbode have enhanced heat-absorbing layer (MPB) for reducing heat loss, promote energy output, and developing semiconductor bridge (SCB) / nano-active metal bridge group launched technology to improve the non-primary explosive microfabrication film (NRM). Our future plan is built around the best MPB analysis mechanisms and rules by the presence in our pseudo blackbode structure, enhance the heat absorbing layer, first. Secondly, we intend to investigate the relationship between the heat transfer on Standard Chartered and natural resource management vibrant deflagration density and natural resource management and physical picture microsturture between, manufacturing.Thirdly achieve MPB / SCB based on non-primary explosive compound ignition / NRM We plan to use the instantaneous electrical metering, high-speed photography and atomic spectroscopy temperature test, study initiation complex maximize energy output electroexplosion characteristic caused. Finally, we plan to explore SCB NRM combustion reaction and microscale heat transfer function of communication theory, analysis of energy transfer mechanism between Standard Chartered Bank and the NRM, and composites start mechanism and we devices.The project will give theoretical guidance intelligent Micro systems in the military and aerospace jobs.

MEMS发火器件为现代轻小武器、小微卫星和微航天器等国防战略领域紧迫需要，是先进火工品重要发展方向。针对MEMS发火器件存在发火输出低、微加工难问题，提出复合强化吸热灰体结构（mPB）聚能降耗提高发火输出、发展基于半导体桥换能元（SCB）/含能金属桥膜（NRM）无装药发火技术改善加工的新思路。研究强化吸热灰体结构（mPB）吸热聚能规律与机理，实现最优mPB结构；探索含能密度-微观组成间构效规律及SCB爆热、NRM爆燃微观机制，实现基于mPB/ SCB/ NRM的无装药复合发火器件一体化集成；借助瞬态电信号测试、高速摄像、原子光谱测温等手段，阐明发火器件电爆行为规律，最大化发火输出；研究微通道下SCB等离子体传热、NRM爆燃及传播规律，分析SCB/NRM界面换能机制，揭示复合发火机理。本项目相关研究和突破将为军械、空天智能微系统用微发火火工品开发提供科学依据和技术支撑。

本项目针对小微卫星、空天器件、轻小武器的微纳点火器件需求，探索研究无装药、低耗散、可微纳制备的MEMS发火器件中的基础科学问题。主要研究内容如下：（1）可集成、高含能密度、高效率释能含能材料筛选、探索，研究了Al/CuO薄膜化纳米含能材料，发展了新型Al/全氟磺酸离子聚合物（PFSA）、Al/2D MoO3体系；也针对微纳溅射淀积方式的困难，提出了sol-gel湿法集成的设想。使用热化学等分析手段证实Al/PFSA体系的能量密度和能量释放效率远高于当前体系，Al/2D MoO3体系具有较好的能量特性和反应特性；（2）吸热结构的设计、制备与发火器件加工研究，基于吸能效率、掺杂能带调控理论研究，设计了吸热结构的形状、结构，即矩形腔结构、硼掺杂吸热反射层强化吸热再反射以提高能量利用效率，确定了掺杂条件和工艺，确定了器件加工方式与工艺顺序，即硼掺杂单晶硅吸热层、磷掺杂点火桥层；LPCVD法制备多晶硅、再光刻，制备背腔集成的SCB结构，再淀积（或sol-gel或溶液薄膜化）含能材料，实现器件整体制备，发展深化了背腔制备技术和含能材料薄膜化工艺；（3）器件性能测试及发火特性研究，考察了点火器件的反应和点火特性；发现器件结构是其发火性能的主要因素，加入含能金属纳米膜后，特征时间增加、发火输出增加；增加空腔后，发火能量增加；将桥由矩形改为V形后，发火能量增加且特征时间降低；也理论上探索了器件内传热过程、机制，获得了温度分布及热导过程图景，发现绝缘层具有热障作用，致使含能金属薄膜层温度低于半导体桥温度，从而增加其反应时间；桥型不同，电流分布不同，矩形桥电流分布较为均匀，而V形桥电流集中在尖角处；初步理论考察了所研究器件的点火机制；也为半导体桥等离子态高温高压、含能材料及器件爆炸等恶劣环境下的爆压、爆温的测量探索了测试手段。