高冲击下MEMS惯性探测驱动一体化机构与微观碰撞机理研究

The project reasearch is on the background of MEMS devices application for high inertial impact environment and inertia switch quick response ability and ammunition safety special demands.The research contents focus on four sections, which are the principle and methods of acceleration amplitude and duration simutaneous detection and identification, the MEMS mechanism integrated designing and integrated manufacturing,the theory of microstructure intensive dynamic collision mechanism and micro current conduction principle of intensive dynamic structure.The research process will be realized through feasible technology routine,which is combined by four steps.The basic step is theory basis studying,inculding impact,vibration, micro-physics and current conduction.The following is inertial mechanism designing and simulation. The third step is inertial switch samples manufacturing.The last stage is testing and analyzing results.Among the research interests,some science issues will be solved, such as MEMS spring mass damper system(SMDs) intensive dynamic response characteristics, intrinsic factors of planer micro spring non-linear elastic modulus under high impact load, current conduction mode of intensive dynamic metal plate electrodes.Now the mechanism design method is put forward, that is an inertia detection and actuation integration mechanism constituted of cascaded SMDs.The research objective includes making above science issues clear and carrying out some technology innovations, which shows on MEMS inertia detection and actuation, dynamic stability controling and micro courrent conduction principle under intensive dynamic status. The project will develop some new MEMS inertial switch samples which has the properties of little volume,high impact resistance and high response speed. The project is meaningful to enrich the research content of MEMS technology,exploring the expansion of collision mechanism in micro mesoscopic field, meeting the developing requirements of impact resistance, the miniaturization, the intellectualization. It will promote the wide application of MEMS inertia devices in aeronautics, astronautics and military field.

本项目针对高惯性冲击环境及弹药系统对惯性开关的快速和安全性特殊需求，探索高冲击加速度幅值脉宽双阈值实时识别原理与方法，进行惯性检测与驱动机构一体化设计及一体化加工，剖析高动态下微观碰撞机理和开关导电原理。研究拟采取冲击振动和微观物理基础、电流传导理论、惯性机构设计和工艺加工、样品实验相结合的技术路线。主要解决MEMS弹簧质量阻尼系统的高动态动力学响应特性、平面微弹簧弹性系数在高冲击载荷下的非线性变化内因、高动态下金属板接触导电原理等科学问题。研究中提出级联式弹簧质量阻尼系统构成惯性检测检测与驱动一体化机构设计方法。预期形成一种具有体积小、抗干扰、快速响应的无源惯性开关，并实验验证设计理论与方法。研究将在MEMS惯性测量与驱动、高动态冲击下MEMS机构稳定控制以及高动态接触碰撞下导电机理特性等方面具有创新意义。项目研究成果对推动MEMS技术在航空、航天以及军事领域的广泛应用具有重要意义。

本项目针对高惯性冲击环境及弹药系统对惯性开关的快速和安全性特殊需求，探索高冲击加速度幅值脉宽双阈值实时识别原理与方法，进行惯性检测与驱动机构一体化及一体化加工，剖析高动态下微观碰撞机理和开关导电原理。.对级联式弹簧质量阻尼系统进行了理论分析，分析了结构阻尼系数与载荷区分性能的关系，根据结构阻尼系数与上升时间的关系推导出曲折槽参数对于结构阻尼系数的影响。设计了一种双阈值MEMS惯性开关，根据器件性能要求、加工周期、加工难易程度以及加工成本等因素，选择了层间结合力强的多层结构UV-LIGA技术进行开关芯片的加工。对封装后的MEMS惯性开关原理样机进行了动、静态性能测试，研究了原理样机的环境识别性能和抗冲击性能。结合抗冲击实验结果，进一步研究了器件的分层、断裂、塑性变形及黏连等失效模式。.分析了尺寸效应对性能指标以及测试结果的影响。基于应变梯度理论和哈密顿变分原理，建立高冲击下微梁动力学模型，分析尺寸效应对高冲击下微梁挠度、弯曲刚度的影响，修正性能参数并应用到MEMS惯性开关中。.研究了高动态碰撞接触下的导电模式，高动态下闭锁接电机构的接触导电性能主要是受黏着力（主要是静电力）决定，电流是以隧道电流的模式传导。研究将在MEMS惯性测量与驱动、高动态冲击下MEMS机构稳定控制以及高动态接触碰撞下导电机理特性等方面具有创新意义。项目研究成果对推动MEMS技术在航天、航空以及军事领域的广泛应用具有重要意义。