微纳米柱状阵列结构集束机理及设计理论研究

The design and fabrication technologies of the micro and nano structures are the key problems restricting the application of the micro and nano technology. One of the most common used structures, the micro and nano pillar array, has wide potential application in many area. However, the clumping behavior of the pillar array caused by the adhesion forces of the neighbor pillar may significantly diminish its optical, electrical, and mechanical performance and even lead to the failure. Specialized systemic researches on this issue were insufficient. The theoretical models done by scholars have not considered the influences of the environments and materials on the adhesion forces and the elastic forces, thus could not effectively guide the practical design and fabrication. Based on the foundation of the pre-research, beginning with the mechanisms of the elliptical adhesive contact when the two neighbor pillars adhered, referring to some important corresponding theoretical research achievements of the contact mechanism, this project will experimentally research law of the circular and elliptical adhesive contact. On this basis, the universal models for the critical clumping criteria and the clumping stability of the micro and nano pillar array will be established. Then combining the observation of the clumping behavior of pillar arrays, the design criteria for the clumping or nonclumping behavior of the micro and nano pillar array will be established. Achievements of this project will make a contribution to the contact mechanisms and the design theories of the micro and nano pillar array structures.

微纳米结构的设计与制造是微纳米科学与技术的关键问题之一，常见的微纳米柱状阵列结构在很多领域具有广阔的应用前景，但由于柱状结构之间黏着力导致的集束现象会显著影响微纳米结构的性能，可能严重降低其光学、电学、力学性能甚至导致失效。目前该领域研究中对微纳米柱状阵列的集束问题缺乏专门的研究，没有深入考虑不同环境和材料等因素对黏着力及弹性回复力的影响，从而对实际微纳米柱状阵列结构及器件的设计与制造缺乏有效理论指导。本项目拟在申请者前期研究的基础上，参考国内外最新接触理论研究成果，从微纳米尺度下相邻两个柱状结构的椭圆黏着接触机理及规律入手，系统开展不同环境下圆形/椭圆接触的黏着接触规律的实验研究，发展微纳米柱状阵列结构的临界集束判据模型及集束稳定性模型，在实验验证的基础上，提出综合性的微纳米柱状阵列结构集束行为设计准则，从而进一步丰富接触理论及微纳米柱状阵列结构设计理论。

微纳米结构的设计与制造是微纳米科学与技术的关键问题之一，常见的微纳米柱状阵列结构在很多领域具有广阔的应用前景，但由于柱状结构之间黏着力导致的集束现象会显著影响微纳米结构的性能，可能严重降低其光学、电学、力学性能甚至导致失效。目前该领域研究中对微纳米柱状阵列的集束问题缺乏专门的研究，没有深入考虑不同环境和材料等因素对黏着力及弹性回复力的影响，从而对实际微纳米柱状阵列结构及器件的设计与制造缺乏有效理论指导。.本项目使用PS、PE、PDMS等典型的微纳米显微阵列制备材料，使用自研的低温黏着实验台、原子力显微镜等仪器，系统性地研究了系统因素（载荷、速度、接触次数、直径）及环境因素（温度、湿度、基底亲疏水性）对黏着接触的影响规律，建立了临界集束模型并进行了实验验证。分别使用力和能量的判据，分别建立了微纳米柱状阵列结构的集束/非集束临界判据、集束稳定性准测。进一步依据集束和非集束状态的能量状态定义纤维阵列集束的热力学稳定性;依据集束与非集束状态转换的能垒定义纤维阵列集束的动力学稳定性。进而建立了纤维阵列集聚的热力学稳定性和动力学稳定性判定准则，从而结合力学稳定性判据和能量稳定性判据，建立了综合性纤维阵列集束行为设计图。项目成果丰富了微纳米黏着接触理论，并将可望为纤维阵列的集束稳定性设计提供理论依据。