高饱和磁感应强度及良好高频特性的新型高性能软磁薄膜的研究
基本信息
结项摘要
信息电子产品的发展趋势式数字化、集成化和微型化。加快信息电子产品的微型化进程已列入我国2010年远景目标纲要。具有良好高频特性的高饱和磁感应强度的高性能软磁薄膜在推进信息电子产品的微型化方面将会起到十分重要的作用。但饱和磁感应强度大于21KG,截止频率高于1 GHz的高性能软磁薄膜材料的缺乏成了信息电子产品中电感器件微型化发展的瓶颈。. 铁钴（FeCo）合金的饱和磁感应强度可达24.5 KG,但大的磁致伸缩系数也限制了它在软磁方面的应用。将通过氮、氧和铝的添加；用铁磁性多晶或非晶薄膜作夹层，主层FeCo基合金在夹层上生长的迭层化技术等对薄膜的晶粒大小、取向、应力等微结构参数进行控制,射频磁控溅射制备饱和磁感应强度大于21KG,并在GHz频段具有良好频率特性的FeCo基新型高性能软磁合金薄膜.
项目摘要
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数据更新时间：2023-05-31
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