低温SNS型超导量子干涉器件的研制

Superconducting quantum interference device (SQUID) is widely used in the field of magnetic signal measurement, and can achieve highest precision especially in the field of low frequency or static magnetic signal measurement. The project propose the application of low Tc SNS type Nb/NbxSi1-x/Nb material Josephson junction in SQUID, which have the advantage of adjustable barrier layer parameters and good consistency. Compared with the conventional SIS type Josephson junction shunted with resistance, self-shunted SNS type Josephson junction has negligible capacitance, reduced the noise and parasitic capacitance from shunted resistance. The plan of the project is to design device structure and size first , and then study every step of fabrication process separately, fabricate devices with different parameters. Afer that the performance of the SQUIDs will be tested and analyzed in order to be used in the future with good experimental foundation. Stduying low Tc SQUID with SNS type Nb/NbxSi1-x/Nb Josephson junctions is a completely new research direction, there is no scholarly report up to now. So this project has a strong innovative and practical purpose, can make up the gap and improve the international influence of our country in superconducting electronics field.

超导量子干涉器件（简称SQUID）广泛应用在磁信号测量研究领域，在低频以及静态磁信号测量领域是精度最高的器件。本项目提出了用低温SNS型Nb/NbxSi1-x/Nb材料的约瑟夫森结制作SQUID器件，其具有势垒层参数连续可调、结的一致性好等优点。SNS型约瑟夫森结和SIS型约瑟夫森结相比，不仅具有结电容可以忽略不计，而且省去了外部并联电阻，减少了器件的寄生电感、噪声等。本项目计划首先设计器件，然后对器件制作工艺分步进行研究，制作出不同参数的器件，接下来对不同参数的器件进行测量，分析器件性能，为以后实际应用打下坚实基础。用低温SNS型Nb/NbxSi1-x/Nb材料的约瑟夫森结制作SQUID器件是一项全新的研究，尚未有相关学术报道，具有很强的创新性和实用性，可以弥补我国技术空白，在国际上提高我国在超导电子学领域的影响力。

超导量子干涉器件（简称SQUID）广泛应用在磁信号测量研究领域，在低频以及静态磁信号测量领域是精度最高的器件。本项目提出了用低温SNS型Nb/NbxSi1-x/Nb材料的约瑟夫森结制作SQUID器件。首先设计了SNS型SQUID器件，然后对器件制作工艺分步进行研究，并通过调节势垒层参数，制作出了一系列SNS型的b/NbxSi1-x/Nb材料的SQUID器件。对所制作的不同参数的器件，在搭建的低温系统上进行了测量，分析了器件的电流电压特性、磁通响应特性以及频谱噪声分析，为以后实际应用打下了坚实基础。用低温SNS型Nb/NbxSi1-x/Nb材料的约瑟夫森结制作SQUID器件是一项全新的研究，尚未有相关学术报道，具有很强的创新性和实用性，弥补了我国技术空白，在国际上提高了我国在超导电子学领域的影响力。