埃级超光滑表面无磨料低温抛光的理论与实验研究

Nanomachining technology belongs to the leading of machinery. With the flying development of science and technology, people must meet more strict needs to super-smooth surface (such as the roughness of the bearing of the instrument on satellite is Rmax<1nm). Many new methods have respective advantages but it is necessary to have a new set of equipment and difficult to get angstrom-scale supersmooth surface. All of these methods are still relying on traditional polishing with abrasive particles. To achieve supersmooth surface, the abrasive particles become smaller and smaller. The novel process---cryogenic and non-abrasive polishing is proposed in which ice polishing disk tool is used to avoiding abrasive particles to scratch polished surface. Lots of experiments are performed by this new process on the materials of optical glassed and metal (cemented carbide，45 steel，A-alloy). Results prove that it has obvious effect on all of these materials and getting roughness Ra 0.48nm supersmooth surface by ice disk of de-ionized water with optimized parameters. The new process is analyzed by theories of solid-state physics, quantum physic, diaphragm pressure of water molecule and hydrodynamics. The new nanomechining process will have large effects on the development of aviation, astronavigation, optics, semicon, instrumentation, electron, etc.

新世纪对加工表面质量的要求愈来愈高，而传统的有磨料加工即使磨粒再微细也委难实现超光滑表面的加工。本申请突破这一传统，在国际上首创无磨料与低温相结合的新抛光法，在固着磨料低温抛光的基础上时行步加工出埃级超光滑表面。首先探讨无磨料低温抛光的机理、建模并仿真，进而对硬脆和金属两类新型材料进行实验、研究规律和寻优。