面向低浓度甲醛检测的增强氧化铟纳米线晶体管型气体传感器的研究

Formaldehyde is a protoplasm poison, harm to human for long-term, latent, hidden features. Therefore, the accurate, timely, quantitative detection of formaldehyde has attracted more and more attention in the environment. To ensure the safety and health of people, content fast and accurate detection of formaldehyde is essential. "One key to one lock" hybrid sensor configuration is rationally designed and demonstrated as a direct effective route for the target gas specific, highly sensitive and promptly responsive chemical gas sensing for the room temperature operation in a complex ambient background. The design concept is based on three criteria: (i) quasi-one-dimensional metal oxide nanostructures as the sensing platform which exhibits good electron mobility, chemical and thermal stability; (ii) deep enhancement-mode field effect transistors (E-mode FETs) with appropriate threshold voltages to suppress the non-specific sensitivity to all gases (decouple the selectivity and sensitivity away from nanowires); (iii) metal nanoparticle decoration onto the nanostructure surface to introduce the gas specific selectivity and sensitivity to the sensing platform. In this project, Using In2O3 nanowire E-mode FET sensor arrays decorated with various discrete metal nanoparticles (i.e. Au, Ag and Pt) as illustrative prototypes here further confirms the feasibility of this design. Particularly, we wish that formaldehyde could be fabricated based on this concept. The corresponding response/recover time and detection limit will be as low as 5 s and 100 ppb, respectively. All these could have important implications for this "one key to one lock" hybrid sensor configuration which potentially open up a rational avenue to the design of advanced-generation of chemical sensors with unprecedented selectivity and sensitivity.

甲醛是一种原生质毒物，对人体健康的危害具有长期性、潜伏性、隐蔽性的特点。因此对环境中甲醛的准确、及时、定量检测引起了越来越多的关注。为确保生产安全和人们的健康，快速和准确的检测室内空气中甲醛的含量是十分必要的。本项目拟研制氧化铟纳米线增强型晶体管气敏传感器。通过在器件表面修饰金属纳米颗粒，期望研制出基于增强型氧化铟纳米线晶体管的高选择性甲醛气敏传感器，器件探测极限达到100 ppb以下，工作电压小于2伏（单个干电池或者纽扣电池驱动），响应和恢复时间均小于5 s。同时制作对应干扰气体敏感的气敏元件，然后利用微加工技术将它们以与、或、非门的形式进行集成，以达到排除乙醇、CO和H2等气体的干扰的目的。从而获得高灵敏性，高选择性的室内甲醛气体传感器，为将之推向实用化提供技术支持。

甲醛是一种原生质毒物，对人体健康的危害具有长期性、潜伏性、隐蔽性的特点。因此对环境中甲醛的准确、及时、定量检测引起了越来越多的关注。为确保生产安全和人们的健康，快速和准确的检测室内空气中甲醛的含量是十分必要的。本项目拟研制氧化铟纳米线增强型晶体管气敏传感器。通过在器件表面修饰金属纳米颗粒，期望研制出基于增强型氧化铟纳米线晶体管的高选择性甲醛气敏传感器，器件探测极限达到100 ppb以下，工作电压小于2伏（单个干电池或者纽扣电池驱动），响应和恢复时间均小于5 s。同时制作对应干扰气体敏感的气敏元件，然后利用微加工技术将它们以与、或、非门的形式进行集成，以达到排除乙醇、CO和H2等气体的干扰的目的。从而获得高灵敏性，高选择性的室内甲醛气体传感器，为将之推向实用化提供技术支持。