激光高精度同时测量转轴六自由度运动误差与补偿模型的研究

The rotary axis is the basis for rotational motion. Its motion errors have critical effects on the accuracy and quality of precision measuring, machining, or control equipment such as laser tracker, multi-axis CNC machine and multi-Degree-Of-Freedom (DOF) manipulator. Accurately measuring six-degree-of-freedom motion errors of rotary axis and establishing the error compensation model is the essential way to improve the accuracy of these instruments and equipment. Therefore, it is urgent to break through the technical bottleneck that is difficult to achieve high-accuracy, high-efficiency and full-cycle simultaneously measuring the six-DOF motion errors of rotary axis..Based on the solid foundation of our research group on simultaneous measurement of multi-DOF motion errors, the simultaneous measurement method based on single-mode fiber-coupled laser diode is proposed in this project, which focuses on solving the key techniques such as monitoring and compensating the drift of laser wavelength and angle, high-precision and fast servo tracking the rotary axis, multi-type error modeling and compensation of the measuring device. It is to achieve high-accuracy, high-efficiency and full-cycle simultaneously measuring the angular positioning error, tilt motion errors, radial and axial motion errors, and it provides a new way for developing instruments with high-precision, miniaturization and low cost. The source of errors and the law of interaction are to be deeply studied. The error compensation method for rotary axis is to be established to improve the measurement, manufacture and control accuracy of the related equipment.

转轴是旋转运动的基础，其运动误差是制约激光跟踪仪、多轴数控机床和多自由度机械臂等诸多精密测量、加工和控制设备精度的关键因素。精确测量转轴六自由度运动误差，并建立误差补偿模型，是提高这些仪器设备精度的主要途径。因此，迫切需要突破目前转轴六自由度运动误差难以实现高精度、高效率、全周360°同时测量的技术瓶颈。.本项目在课题组前期激光多自由度运动误差测量研究积累的基础上，提出一种基于单模光纤耦合半导体激光器的转轴六自由度误差同时测量方法，解决激光波长和角度漂移的监测与补偿、转轴高精度快速伺服跟踪、测量装置的多类型误差建模与补偿等关键技术，实现转角定位误差、倾斜角度误差、径向和轴向跳动误差的高精度、高效率、全周同时测量，为高精度、小型化、低成本的仪器研发提供新的途径；研究转轴运动误差来源及作用规律，建立误差补偿模型，提高相关仪器设备的精密测量、加工或控制精度。

转轴的运动误差是制约激光跟踪仪、多轴数控机床和多自由度机械臂等诸多精密测量、精密加工和精密控制仪器设备精度的关键因素。精确测量转轴六自由度运动误差，并建立误差补偿模型，是提高这些仪器设备精度的主要途径。本项目针对转轴运动误差这一影响五轴数控机床等仪器设备性能的关键因素，开展转轴六自由度运动误差的同时测量方法和补偿模型研究。项目研究了基于单模光纤耦合的半导体激光器的转轴六自由度运动误差同时测量方法，分析了测量重复性精度等关键性能指标，攻克了激光漂移监测、多探测器信号高速同步采集等关键技术，并先后研制了两版小型化的测量系统。最终实现了转轴角度误差的测量重复性达到角秒级，直线度误差的测量重复性达到微米级。.项目基于刚体运动学理论和齐次坐标变换理论，研究建立了转轴六自由度运动误差同时测量的误差补偿模型，实现了非同轴安装误差、组件制造误差以及光线漂移误差等多种类型误差的统一补偿，显著提高了系统测量精度，为相关测量误差的补偿提供了重要的理论补充。项目开展了转轴六自由度运动误差同时测量的实验研究，包括实验装置及测量系统的标定实验、与标准仪器的对比实验、以及测量重复性和稳定性等实验。为了确切分析所研制系统的测量准确性，以多面棱体为敏感单元，研究并实现了转轴六自由度运动误差的可靠对比测试。.项目实现了转轴六个自由度运动误差的高精度、高效率、全周360°同时测量，对于提高转轴相关精密仪器设备的精度，具有重要的科学意义和应用价值。