界面驱动式智能柔性变形镜制造及其远程操控

Deformable mirror for space optical system is the frontier research field of advanced manufacturing and adaptive optics. Primary investigations include developing novel actuation mechanisms, controllable fabrication methods of multi-materials/multi-structures, and real-time/location manipulation strategies. While traditional deformable mirror suffers from its low integration, MEMS (Micro-Electro-Mechanical System) deformable mirror faces the rigorous challenge in achieving large aperture. In this project, a novel intelligent flexible continuous-membrane deformable mirror is proposed. The deformable mirror is constructed by intelligent soft material with embedded micro/nano-scale actuation unit array. Based on property difference between the flexible substrate and the embedded actuation unit at the material interface, structured laser is adopted to realize remote manipulation of the flexible continuous surface. To this end, we will carry out lots of research work on the following studies. First, we will investigate the dynamic deformation behaviors of the intelligent flexible surface during the laser-thermo-deformation process, and reveal the laser-driven deformation mechanism. Second, we will study the composite fabrication process for multi-scale and multi-material system based on integrating additive manufacturing and nano-imprint technique, and realize controllable fabrication of large-aperture continuous deformable mirror. Third, we will investigate the control model of the intelligent flexible deformable mirror manipulated by structured laser, and develop real-time/location manipulation strategy for the deformable mirror. The proposal aims to develop a new route for manufacturing and manipulation of large-aperture and high-integration flexible deformable mirrors for space optical systems.

空间光学系统用变形镜研究是先进制造和自适应光学领域的前沿，新的形变驱动机理、多材料/物理结构曲面的可控制造方法、以及实时/域面型操控策略是核心问题。针对传统变形镜集成度低、MEMS变形镜口径小的瓶颈问题，本项目提出一种智能柔性连续薄膜变形镜结构及其界面驱动方式，构建内嵌纳米材料功能单元的智能柔性连续曲面，利用柔性基材与内嵌功能材料的界面效应，采用结构激光场实现对柔性曲面面型的实时/域远程操控。为此，研究智能柔性曲面光-热-机械形变过程的动力学行为，揭示智能柔性变形镜的界面驱动机理；发展增材/压印复合的多材料体系/物理结构曲面的材料-结构一体化制造方法，实现大口径、高集成度柔性连续薄膜变形镜的控形控性制造；建立结构激光场对智能柔性曲面的操控模型，实现智能柔性连续变形镜面型的实时/域远程操控。旨在为空间光学系统用大口径、高集成度智能柔性连续变形镜的可控制造与远程操控提供一条新途径。

针对传统变形镜集成度低、MEMS变形镜口径小的瓶颈问题，以研制轻质、柔性、可远程操控的大口径变形镜为目标，本项目提出一种智能柔性连续薄膜变形镜结构及其界面驱动方式：以定域微结构化的智能柔性曲面为工作面，以定域微结构化嵌入的纳米功能材料单元为致动单元，以多材料体系的界面匹配性(热膨胀系数差异)为驱动，采用结构激光场远程操控该智能柔性曲面产生定域形变，实现对入射光的波前调制。项目执行过程中，开展了智能柔性曲面光-热-机械变形过程的建模、仿真及实验表征，研究了多材料体系及材料界面的温度场分布和变形场分布，建立了智能柔性曲面形变的光-热-机械耦合模型，揭示了智能柔性变形镜的界面驱动机理；研究了激光激励源、多材料组织、多尺度结构对智能柔性曲面驱动特性的影响机制，优化设计了智能柔性变形镜的结构/材料参数，建立了智能柔性变形镜的可控制造与夹装工艺；发展了多路可编程激光驱动的智能柔性变形镜面型操控技术，建立了激光参数与变形镜面型形变的映射函数关系，实现了变形镜复杂面型的定域操控，研制了智能柔性变形镜原型样机，开展了其变形性能测试及波前校正效果评估。综上所述，本项目从器件原理、结构优化、以及面型操控等方面，研究了智能柔性变形镜的界面驱动机理及变形性能影响机制，建立了智能柔性变形镜的结构/材料优化设计方法，探索了智能柔性变形镜的可控制造工艺，发展了结构激光驱动的智能柔性变形镜实时/域操控技术，评估了智能柔性变形镜的波前像差校正效果，结果表明该智能柔性变形镜在波前低阶像差校正中具有较好的应用前景。