基于电可调超表面的超高速波长选择开关的理论和关键技术研究

With the rapid increase of network users and consistent emerging of new network services, the bandwidth of optical switching network and the number of supported users face the great demand of increase with the order of magnitude. It also raise the demand for the network topology and performance of equipment. As the core component for all-optical switching, Wavelength-selective Switch (WSS) is currently realized based on MEMS or LCoS techniques, but its switching speed cannot satisfy the demand, which has become the bottleneck to construct high-speed optical network. In recent several years, the metasurface technology has been proved to effectively operate on the phase, amplitude and polarization at sub-wavelength level. The applicant for the first time propose the realization of new core chip of WSS based on metasurface technology. In this project, we are planning to perform the research of basic theory and key technology of WSS based on metasurface. The contents include the theory of optical modulation of metasurface, design and fabrication of material and component structure, design of WSS scheme. It aims to realize WSS with faster switching speed, smaller volume and less insertion loss and to raise the overall performance of Reconfigurable Optical Add-Drop Multiplexer (ROADM) finally. It hopes to provide theoretical and technical support for the development and application of high-flexible next-generation optical switching network.

随着网络用户的迅猛增加和新型网络业务的不断涌现，光交换网的速度和支持用户数都面临数量级增长的需要，也对网络拓扑以及设备性能提出了更高的要求。作为全光交换的核心器件，波长选择开关(WSS, Wavelength-selective Switch)目前主要基于MEMS和LCoS实现，但其开关速度远不能满足需求，成为构建高速光网络的瓶颈。近几年来超表面技术已证明可在亚波长分辨率下同时实现光相位、振幅和偏振的有效控制。申请人首次提出利用超表面技术实现新型波长选择开关核心芯片，本项目计划展开基于超表面的波长选择开关的基础理论和关键技术研究，包括：超表面光学调制的理论研究，材料及器件结构的设计和制备，波长选择开关的方案设计，最终实现开关速度更快，体积更小以及损耗更低的波长选择开关，提升可重构光分插复用器整体性能，为高灵活度的下一代光交换网络的发展与应用提供理论与技术支撑。

随着网络用户的迅猛增加和新型网络业务的不断涌现，目前主要基于MEMS和LCoS技术的波长选择开关(WSS, Wavelength-selective Switch)的开关速度已经远不能满足需求，成为构建高速光网络的瓶颈。为了解决上述问题，本项目提出了利用超表面技术实现新型波长选择开关并展开研究，取得的主要成果有：（1）通过理论分析和仿真软件辅助，深入的研究了超表面对光波相位和振幅的调控机制及影响因素；（2）对超表面中的关键材料的制备进行了系统的实验研究，保证超表面器件的优异性能；（3）通过半导体加工工艺及其优化对超表面器件的制备进行了实验研究，并重点解决了器件的静电损伤以及串扰问题。