可溶性固着软质磨粒薄膜抛光方法的研究

To meet the high efficiency and high precision polishing of the advanced ceramics, and solve the problems in the present polishing film processing, such as short service life and bond material contamination on the surface of workpiece, a novel polishing method using the soluble fixed soft abrasive film is proposed: A kind of soluble high polymer is used as bond material, and coated on the elastic substrate with multiple layers of soft abrasives, which have different size. During the polishing process, the bond material in surface layer of the polishing film can be dissolved by the certain water based solution, which has no harm to environment. The worn abrasives fall off from the surface layer, and the fresh abrasives in subsurface layer come out. As a result, the polishing ability of the film can be maintained. For the dissolution of bond material in surface layer, the surface contamination of workpiece is removed. In this project, the chemical action between the bond material and the water based dissolvent, the kinematic and mechanical feature of abrasives in surface layer of the film, the chemical and mechanical action between abrasives and workpiece, the influence of distribution of abrasives on the machining ability of the film, design and manufacturing method of the film, and processing optimization are studied. It is expected that a green, high efficiency and ultraprecision polishing method will be developed, and it is valuable for the science probe and engineering application.

针对先进陶瓷器件高效、高精度抛光的加工要求，解决现有抛光薄膜使用寿命短、工件表面易受结合剂黏着污染等问题，提出一种可溶性固着软质磨料薄膜抛光方法：以可溶性高分子材料为结合剂，将多层具有不同粒度特征的软质磨粒涂覆于弹性薄膜基底上。加工过程中，采用无毒无害的水性溶剂溶解薄膜表层的结合剂，降低结合剂对磨粒的把持力使其脱落，可以去除表层钝化磨粒，露出新磨粒，使抛光薄膜拥有较为持久的抛光性能；由于结合剂被溶解，消除了抛光表面的结合剂黏着污染。本项目研究探索结合剂与溶剂之间的化学作用机理，分析薄膜表层磨粒的运动特性及力学特性，揭示软质磨粒与工件材料的物理化学作用规律及工件材料的去处机理，探索磨粒结构特性及其分布对薄膜加工性能的影响规律；完善软质磨粒抛光薄膜的设计原则和制造方法；构建加工实验平台，优化加工工艺。本项目发展了一种新型的绿色、高效的超精密抛光方法，具有重要的科学意义和应用价值。

针对先进陶瓷器件高效、高精度抛光的加工要求，解决现有抛光薄膜使用寿命短、工件表面易受粘结剂黏着污染等问题，提出了一种可溶性固着软质磨料薄膜抛光方法。.项目完成的主要工作如下：研究了可溶结合剂与水性溶剂之间化学作用机理，提出了可溶性软质磨粒抛光薄膜的制备方案。以表面处理过的75µm PET薄膜为基底，选择一种成膜“不可溶”高分子聚合物作为主粘结剂，一种与其相溶的水溶性聚丙烯酸树脂作为“可溶性”结合剂，两种SiO2平均粒径分别为10nm和20nm的异丙醇硅溶胶作为磨粒来源，添加成膜助剂，采用多层多次交叉涂布，优化干燥工艺，获得了一种磨粒涂覆层厚度为8µm，纳米二氧化硅固含量达到70wt%，附着力达到2级的磨粒涂覆层。采用离散元方法建立了抛光薄膜的物理仿真模型，研究了可溶性固着软质磨料薄膜的结构和物理特性。根据现有的理论模型进行优化，得到了抛光薄膜的材料去除模型，研究了磨粒的力学特性和运动学特征。测试了工件材料化学-机械材料去除作用过程，使用溶解法、表面摩擦法和验证性抛光实验等手段揭示了可溶性固着软质磨粒薄膜的抛光机理。针对磨粒涂覆层弹性模量、硬度等物理性能的要求，确定了抛光薄膜涂覆方法和配方比例等涂覆工艺。分析了抛光过程光纤插芯端面的轨迹，优化了抛光薄膜的磨损均匀性。使用可溶性软质固着磨料薄膜在中心加压式光纤头研磨抛光机上对光纤插芯端面进行抛光实验，研究不同压力，速度，温度，抛光液成分下光纤插芯端面的加工质量和加工效率，获得了良好的表面质量和加工效率。.本研究实现了先进陶瓷器件的高精度、高效、低成本的超精密抛光。本课题开发的新型纳米二氧化硅抛光薄膜，在二氧化硅固含量，耐用度，抛光稳定性等指标上达到了国际同类产品的性能。项目共发表论文15篇；申请专利23个，其中授权发明专利5项，协助承办国际国内会议6次。