高效率电子源无放电激发气体发光机理及器件制备研究

The novel display technology play an important role for development of information industry in China. We can obtain a novel display technology based on gas radiation excited by electron with discharge free. For the novel display technology, the top scientific problems need to be resolved are the mechanisms of electron source which can emit electron with high efficiency in gas and electron exciting gas. The project will carry out fundamental research about electron source with high efficiency, electron exciting gas with discharge free, and device fabrication. We can obtain the key process of high efficiency electron source which can emit electron in gas after researching the multilayer anodization with power pulse and new composite oxidation which for preparing porous silicon electron source, and the electron-emitting characteristics at different process. Through researching negative resistance during electron-emitting, electron energy distribution, and the mechanism of electron exciting gas, the method to control electron emission and vacuum ultraviolet radiation with high efficiency which caused by electron exciting gas will be obtained. Also we can obtained a novel display technology with high efficiency through researching the critical preparing process and characteristics of the novel display device based on gas radiation excited by electron with discharge free. The project on promoting development of novel light-emitting display technology with high efficiency, the revolution of performance and functional for traditional vacuum electron device, and application of electron source in the field of semiconductor electron beam etching and LLL image sensor, has important scientific significance and application value.

新型显示技术是我国信息产业发展的重要支柱，基于电子无放电激发气体发光可以获得一种新型发光显示技术，能在气体中发射电子的高效率电子源和电子激发气体发光机理是这一新型显示技术亟需解决的重要科学问题。本项目将开展高效率电子源、电子无放电激发气体发光及器件制备的基础研究。通过研究多孔硅电子源的脉冲多层腐蚀和新型复合氧化方法，以及不同工艺时的电子发射特性，获得能在气体中发射电子的高效率电子源关键工艺；研究电子发射的负阻效应、电子的能量分布，以及电子激发气体发光的机理，获得高效率电子源的控制方法和气体受激高效率辐射真空紫外的方法；研究基于电子无放电激发气体发光器件的关键工艺和器件特性，获得一种高效率的新型显示技术。本项目对推动高效率新型发光显示技术的发展，传统真空电子器件性能和功能的变革，以及电子源在半导体电子束蚀刻和微光图像传感器等领域的应用，具有重要的科学意义和应用价值。

基于电子激发气体发光是一种新型无汞发光技术，既可以实现可见光发光，也可以产生紫外辐射，可广泛应用于环保、能源、加工、照明、医疗、生物和国防等领域。稳定、可控及高效的电子源器件制备及电子激发气体发光机理研究，是获得无放电激发气体发光亟需解决的重要科学问题。.项目研究了单层和多层多孔硅结构及其氧化程度对电子发射特性的影响规律，并获得了固定电化学腐蚀量条件下，优化的恒流电化学腐蚀参数。项目提出了电化学氧化与快速热氧化相结合的两步氧化方式，解决了传统氧化方式难以对较厚多孔硅层进行充分均匀的氧化，从而导致发射电流小、效率低的问题；提出了阴极还原和电形成预处理相结合的复合处理方法，显著改善了多孔硅电子源的负阻特性，减小了电子发射的涨落；提出了电化学氧化与阴极还原相结合的低温复合处理工艺，以及基于NiCl2溶液的多孔硅低温化学内表面修饰方法，对多孔硅电子源的制备和广泛应用具有一定的应用价值。.项目还设计制作了基于壁垒型和多孔型氧化铝介质层的电子源原型器件，实验获得了器件制作工艺对电子发射特性的影响规律。研究了基于多孔型氧化铝介质层的MIM电子源在氖气和氙气环境下的电子发射特性，实验获得了注入电子直接激发气体的无放电气体发光。本项目对新型无汞发光，紫外光源，半导体电子束蚀刻和微光图像传感器等领域的应用，具有重要的科学意义和应用价值。