三维金属微纳结构的激光光镊直写研究

Metallic micro/nanostructures have significant applications in Micro/nanoelectronics, MEMS, surface plasmonics, metamaterials, etc. Therefore, the fabricating technologies of metallic micro/nanostructures, especially of three-dimensional (3D) metallic micro/nanostructures, have attracted increasing attentions in the field of scientific research. Direct writing of 3D metallic micro/nanostructures by laser tweezers will be studied in this project. Firstly, we will fabricate metallic micro/nanostructures in solution with different laser and nanoparticle parameters to investigate their influences on the fabricated structures, including the process resolution and accuracy of the structures, the morphology of the structures and processed nanoparticles, the fusion degree between the processed nanoparticles, and the performance of the fabricated structures. The control mechanism for the processed structure will be revealed based on the experimental results and theoretical calculation. Secondly, the influence factors and process conditions for 3D metallic micro/nanostructures will be investigated and 3D metallic micro/nanostructures with high-performance will be fabricated. This project will contribute to further revealing the interaction process between the light and metallic nanoparticles. It will also provide a protocol for direct writing of 3D metallic micro/nanostructures.

金属微纳结构在微纳电子学、MEMS、表面等离激元光子学、超颖材料等方面具有重要应用，因此，对于金属微纳结构的加工与制备技术、特别是三维金属微纳结构的加工与制备技术的研究，已经成为国际上所关注的一个热点研究领域。本项目基于目前三维金属微纳结构制备中存在的问题，对三维金属微纳结构的激光光镊直写展开研究。首先，在含有金属纳米颗粒的溶液中利用激光光镊直写金属纳米颗粒构筑纳米线、纳米点等金属微纳结构, 研究激光和金属纳米颗粒参数对结构加工分辨率、加工精度与形貌，组成结构的纳米颗粒形貌和纳米颗粒间的结合、熔合程度，结构性能等方面的影响，并揭示出激光光镊直写金属微纳结构的控制机理。其次，在此基础上，研究利用激光光镊直写三维金属微纳结构过程的影响因素与制备条件，实现高性能三维金属微纳结构的激光光镊直写。本项目的研究有助于进一步揭示光与金属纳米颗粒的相互作用过程，为三维金属微纳结构的直写制备提供重要方法。

本项目对银、金微纳结构的激光光镊直写进行了研究。利用飞秒激光光镊直写技术实现线宽为286 nm的连续银线和线宽为447 nm的连续金线的加工，并对激光波长、扫描速度、激光功率等对加工的影响进行了研究；初步利用激光光镊直写技术对银、金三维微结构直写进行研究，实现了金属三维结构的直写。此外，还利用单束激光实现了金圆环结构的增减材制造。项目的研究对于激光光镊直写控制机制的研究具有重要的科学意义。该项目所实现的银、金微纳结构直写在柔性微纳电子器件，SERS，及超颖材料结构制造方面具有一定的应用前景。