基于微色谱-阵列MOS传感器的多组分高精度气体检测关键技术研究

High precision and rapid detection of multi components for polluted gas in complex background is one of the key technologies to realize environmental protection and control. In order to meet the practical application requirements of pollution gas detection in different fields, some key scientific problems such as the high specificity detection of components, the high sensitive detection of multi component gases and high precision detection between each component will be studied and solved in this project. Micro gas chromatography column (GC) with high resolution and rapid speed will be developed. The sensitive mechanism of nano composite material with high specificity will be studied, and the nano composite material will be used for fabricating the MOS sensor, and then an array MOS sensor with multiple components and high sensitivity detection will be developed. A micro system integrated with micro GC column and array MOS sensor will be developed, solving the mutual interference between gases, which provides a new research idea for realizing the detection of environmental pollution gas with high sensitivity and accuracy. The successful development of the integrated detection technology will help to promote the new development of gas detection technology in complex environment.

复杂背景下污染气体多组分、高灵敏、高精度现场快速监测是实现环境保护和治理的关键技术之一。本项目围绕不同领域的污染气体多组分、高灵敏、高精度现场检测的实际应用需求，拟解决污染气体各组分高特异性检测、多组分高灵敏检测及各组分间高精度无干扰检测等关键科学问题。研究快速高效分离的微型色谱柱（GC）；研究基于高特异性纳米复合敏感材料制备高灵敏的MOS（Metal Oxide Semiconductors Sensor）传感器；研究多组分高灵敏检测的阵列化MOS传感技术，并系统集成研制出集样品分离、检测于一体的微色谱-阵列MOS集成检测系统。项目创新性的利用微色谱强大分离能力来突破高灵敏MOS传感器本身抗干扰能力弱的技术瓶颈，为实现污染气体多组分、高灵敏、高精度现场检测提供了新的研究思路,该集成检测技术的成功研制将有助于推动复杂环境下气体检测技术的新发展。

复杂背景下污染气体多组分、高灵敏、高精度现场快速监测是实现环境保护和治理的关键技术之一。本项目围绕不同领域的污染气体多组分、高灵敏、高精度现场检测的实际应用需求，拟解决污染气体各组分高特异性检测、多组分高灵敏检测及各组分间高精度无干扰检测等关键科学问题。开展了快速高效分离的微型色谱柱（GC）；开展了基于高特异性纳米复合敏感材料制备高灵敏的MOS（Metal Oxide Semiconductors Sensor）传感器的研究，开展了多组分高灵敏检测的阵列化MOS传感技术研究，并系统集成研制出集样品分离、检测于一体的微色谱-阵列MOS集成检测系统，实现了苯,CO,H2S,NO2,SO2等气体的高灵敏高精度检测，其中对苯的检出限可以低至10ppb，分析时间少于5min。项目发表高水平论文11篇，2篇会议论文，申请12项专利，获得2项省部级科技奖。