基于隧道磁电阻的蛋白质芯片磁生物传感器系统研究

The protein chips have incomparable advantage of protein bio-molecular detection and new medicine research and development. The market demand of protein chip is huge. The multi-analytic ability, high sensitivity, quick and inexpensive of protein chip magneto-resistive biosensor based on tunnel magneto-resistive (TMR) make it a strong contender for versatile and portable molecular diagnostics in both research and clinical settings. This project aims at developing TMR based protein assay magneto-resistive biosensor array system. In order to develop magneto-resistive biosensor with high performance, we will focus on the following investigations. Firstly, systematic study will be done to explore the new process technology for develop high magneto-resistive ratio and detection sensitivity. Secondly, the distortion mechanism for small low frequency signal of the TMR biosensor will be investigated and the periphery signal process IC.is designed for quick and undistorted detection of biosensor. Finally, the system in package of TMR array, protein chip and periphery signal process IC will be realized which has high sensitivity (<20f mol/l), high throughput (16 channel), rapid detection (<30 minutes) characteristics. The input reference noise is less than 1nT/ sqrt(Hz), dynamic range is 0.01-200 Oe. The power consumption is less than 8mW from a 3.3 V supply. After carrying out this project, the following achievements will be brought forth: 2-3 publications in SCI/EI journals, 2 patents.

蛋白质芯片在疾病相关蛋白的发现和诊断以及新药研发领域具有无可比拟的优越性，具有巨大的社会需求和广阔的市场前景。基于隧道磁电阻的蛋白质芯片磁传感器系统具有高灵敏度、高通量、快速、廉价等特点，有望成为未来蛋白质芯片检测的主流技术。本项目将对基于隧道磁电阻的蛋白质芯片磁传感器系统中的基础科学问题和技术问题进行系统研究。探究提高隧道磁电阻的检测灵敏度的工艺改进方法，研究磁传感器微弱低频信号的快速、高保真检测方法。力争实现蛋白质芯片，隧道磁电阻传感器阵列和外围信号处理IC的系统级封装。目标传感器系统的蛋白质检测浓度可低至20f mol/L，同时检测16路信号，检测周期小于30分钟。输入参考噪声小于1nT/sqrt(Hz) ，检测磁场强度0.01-200 Oe。系统整体功耗小于8mW(VDD-3.3V )。发表SCI/EI论文2-3篇,发明专利2篇

本项目系统的研究了隧道磁电阻的线性度和灵敏度的关系，采用substrate/Ta/Ru/Ir-Mn/Co-Fe/Ru/Co40Fe40B20/MgO/Co80-xFexB20/Ta/Ru结构制备了磁阻变化率高达190%的TMR，单TMR尺寸300um*450um。项目采用基于通量斩波器的1/f噪声消除方案，将TMR的在1Hz附近的噪声从4nT/√Hz降到0.3nT/√Hz。本项目设计完成了应用于磁生物传感器的微弱信号检测和调理芯片，芯片采用华宏NEC 0.5um工艺，芯片面积3.7mm2，功耗2mA，供电电压5V，输入电压的修调范围为150mV，输入信号量程4-60mV，输入信号最小检测电压100uV。本项目最终将TMR芯片，微弱信号检测芯片和带有蛋白质分子捕获抗体的反应皿组装在PCB基板上，实现了蛋白质分子磁生物传感器系统，测试结果表明该系统的检测灵敏度为100fmol/L。