全禁带硅基复周期光子晶体新型制备技术及器件研究

Hybrid photonic crystals (PC), namely by combining two lattices to create hybrid lattice geometries, which produce larger photonic band gaps (PBGs), can effectively improve the performance of photonic devices. Hybrid PC structures are usually fabricated through focused ion beam, electron beam lithography and nanoimprint lithography methods, which are money-costing, time-consuming and difficult to realize large-size fabrication and therefore limit their potential applications in mass-production. Based on our early work, a novel method to fabricate self-positioned micro-nano-hybrid porous structures on the partly oxidized porous silicon (POPS) substrate is presented. We aim to investigate the design and fabrication of hybrid-lattice PCs with micro-nano-hybrid porous structures. Firstly, we will present numerical simulations of photonic bands for 2D micro-nano-hybrid porous structures. The influence of the hybrid PC structures on the optical properties will be investigated. Then, we will try to understand the mechanism of the formation of these self-positioned nano-sized pore arrays on the POPS substrate and establish an effective model. After that, we hope to realize controlled preparation of 2D hybrid PCs with large PBGs and high performance photonic devices through the introduction of point or linear defects. These may provide an efficient realization of simple, effective and large-area fabrication of 2D hybrid PCs and devices, and will lay substantial technique foundation for promotion in new devices.

复周期光子晶体通过将多种周期结构叠合，增加光子禁带宽度，能有效提高光子器件性能。目前电子束、离子束、纳米压印法等技术手段虽可制作微纳尺度光子晶体，但效率低、成本昂贵、大面积制作困难，导致复周期光子晶体器件难以实现规模化生产。本项目提出在部分氧化宏孔硅（POPS）衬底上制造复周期光子晶体微纳复合结构的新方法，开展基于该结构的硅基复周期光子晶体设计理论及可控制造研究。重点探讨微纳复合宏孔结构的相关结构和工艺参数对光子带隙的影响规律；揭示在POPS 衬底上“自定位”生长纳米直孔阵列的成孔机制；建立具有宽禁带的复周期光子晶体结构的大面积制备方法；并在此基础上，通过在复周期结构中引入点、线缺陷等人工缺陷态，实现高传输效率光子晶体功能器件的可控制备。本项目的成功将解决二维复周期光子晶体及器件的简单、高效、大面积制造难题，有助于推动光子晶体向器件和产业化方面的深入发展。

复周期光子晶体因具有大的光子禁带宽度，在光子器件领域备受关注。本项目针对目前微纳尺度光子晶体制备存在的一些问题，如耗时长、成本高、大面积制作困难，提出了一种在部分氧化宏孔硅（POPS）衬底制造二维复周期光子晶体结构的新方法。开展了基于该结构的硅基复周期光子晶体设计理论及可控制造研究。探讨了微纳复合宏孔结构的相关结构和工艺参数对光子带隙的影响规律；揭示了在POPS衬底上“自定位”生长纳米直孔阵列的成孔机制，提出一种新的耗尽模型；建立了具有宽禁带的复周期光子晶体结构的大面积制备方法；并在此基础上，初步探索了三维复周期光子晶体结构的制备及提出了一种限制纳米孔形貌的“瓶颈效应”。本项目的研究解决了二维复周期光子晶体及器件的简单、高效、大面积制造难题，有助于推动光子晶体向器件和产业化方面的深入发展。