基于自组装微阵列结构的高灵敏度柔性压力传感器研究

Flexible pressure sensor is a novel and burgeoning flexible sensitive electronic component, which has important value in consumer electronics, medical health, electronic skin, and so on. How to achieve high sensitivity is one of the key issues in the research of flexible pressure sensor. In this project, we propose a method for the fabrication of flexible surface micro array by using the polymer microspheres self-assembled arrays of as sacrificial templates. Moreover, the one-dimensional metal nanowires will be used as conductive elements to fabricate flexible pressure-sensitive conductive composites with strong piezoresistive effect. Then, the flexible pressure sensor with high sensitivity will be researched by combining with the surface microarray structure and the flexible pressure-sensitive conductive composite materials. In this proposal, we will elucidate the mechanism of the influence of surface microarray structure on the sensitivity of the flexible pressure sensor, and reveal the conductive network characteristics of metal nanowires in the flexible pressure-sensitive conductive composites and the mechanism of the piezoresistive effect. Moreover, we will understand the synergistic effect mechanism between contact resistance and volume resistance in the flexible pressure sensors, and establish the structure-function relationship between the materials, structure and sensitivity of the flexible pressure sensor. Those will provide more adequate scientific basis for the construction of highly sensitive flexible pressure sensor.

柔性压力传感器是一种新兴柔性敏感电子元器件，在消费电子、医疗健康、电子皮肤等领域具有重要应用价值。如何获得高灵敏度是传感器最为核心的问题之一。本项目提出以聚合物微球自组装阵列为牺牲模板制备柔性表面微阵列结构并实现微结构精密调控；同时采用一维金属纳米线为导电基元，制备强压阻效应的柔性压敏导电复合材料；再将表面微阵列结构与柔性压敏导电复合材料相结合，开展高灵敏度柔性压力传感器研究。本项目将阐明表面微结构对灵敏度的影响机制，揭示柔性压敏导电复合材料的导电网络特性与压阻效应的微观机理，弄清接触电阻与体电阻在柔性压力传感器中的协同作用，建立柔性压力传感器材料、结构与灵敏度之间的构效关系，为构建高灵敏度柔性压力传感器提供更充分的科学依据。

本项目开展了基于自组装微阵列牺牲模板技术制备高灵敏度柔性压力传感器及其性能的相关研究工作。在微阵列结构的构建与调控方面积累了丰富经验，并基于此构建了电阻式与电容式柔性压力传感器，并将相关材料与方法拓展到了柔性可拉伸应变传感器的制作，系统研究了微结构的形貌、尺寸、间隔、组合方式等对传感器性能的影响规律，探寻了提高传感器性能尤其是灵敏度的途径与方法，阐明了微结构接触电阻、介电材料的介电常数与厚度对柔性压力传感器灵敏度影响的协同作用机制，为开发高灵敏度柔性压力传感器提供了实验与理论参考。本研究还展示了所研制的柔性传感器在人体健康与运动、智能机械手控制、网联网感知等领域的良好应用潜力，为柔性可穿戴电子器件的发展提供了一种新的选择。