激光与AFM复合构建超级石墨烯功能结构的方法及其机理研究

Super graphene, a new type network structure composed by regularly ordered carbon nanotubes, has many unique mechanical, electrical, thermal, and optical properties. However, due to the complexity of the covalent atomic network structure of super graphene regular hexagonal ring, the controllable construction of the functional structure of super graphene has become an unresolved frontier issue. The project aims to build the functional structure of super graphene with laser and atomic force microscopy (AFM). The project centers on the scientific issue concerning the controllable mechanism of energy field and the mechanism of influence on nano-fabrication. A series of researches will be performed about energy field regulation mechanism and multi-energy field coupling under different conditions, morphology and micro-structure evolution mechanism induced by multi-functional fields, and controllable construction method and prototype of super graphene, etc. It is expected to realize the innovation and breakthrough in theory, technology and equipment for the controllable construction of the functional structure of super graphene. The research results of the project will provide important theoretical and technical support for the development of new micro/nano functional devices, micro/nano mechanical and electrical system, new materials and so on.

超级石墨烯，作为一种新型规则有序的碳纳米管网络结构，具有诸多独特的机械、电学、热学、光学等优异性能，然而，由于超级石墨烯规则六元环共价原子网络结构的复杂性，有关超级石墨烯功能结构的可控构建成为国际上悬而未决的前沿难题。本项目旨在采用激光与原子力显微镜（Atomic Force Microscopy, AFM）复合的方法以构建超级石墨烯功能结构。项目围绕能场/耦合能场调控原理及其对纳米制造的影响机制这一科学问题，针对不同情形下的能场调控机制及多能场耦合效应、多能场诱导碳纳米管形貌特征及微观组织演化机理、超级石墨烯功能结构可控构建方法及原型系统等方面展开研究，预期实现超级石墨烯功能结构可控构建在理论、技术与装备上的创新与突破。项目的研究成果将为新型微纳功能器件制造、微/纳机电系统制造、新材料开发等提供重要的理论与技术支撑。

超级石墨烯，作为一种新型规则有序的碳纳米管网络结构，具有诸多独特的机械、电学、热学、光学等优异性能，在大规模集成电路、新型微纳米功能器件制造等方面展现了诱人的应用前景。然而，由于超级石墨烯规则六元环共价原子网络结构的复杂性，有关超级石墨烯功能结构的可控构建仍是国际上悬而未决的前沿难题。本项目通过激光与微纳探针复合的方法，围绕不同情形下纳米操作与连接过程中的能场调控机制及多能场耦合效应，构建了激光复合探针原位操作和连接原型系统，分析了激光辐照微纳探针微区能量转移机制及能量调控规律, 结合多物理场耦合调控下纳米对象的形貌及微观组织演变理论，获得了不同基底的高精度刻蚀工艺。同时基于激光复合系统对碳纳米管在操作及连接过程中的界面行为进行研究，分析了多物理场诱导下碳纳米管互连界面形貌特征及原子演化机理，实现了不同尺度的超级石墨烯功能结构的可控稳定制造，并以超级石墨烯功能结构为基础探索了其在纳米电子学领域的进一步器件应用，为新型微纳功能器件制造、微/纳机电系统制造、新材料开发等提供了重要的理论、技术与装备支撑。